A Systematic Study of Graphite Local Oxidation Lithography Parameters Using an Atomic Force Microscope

Nanoscience and Nanotechnology Letters

Volumn 2, Issue 2, 2010, Pages 185-188

  Kitu Kumar, ^a   Stefan Strauf, ^a   Yang, E H ^a  

^a Stevens Institute of Technology   (United States)

Author keywords

Anodic Oxidation.; Atomic Force Microscope; Graphene; Lithography

Indexed keywords

ATOMIC FORCE MICROSCOPE; ATOMIC FORCE MICROSCOPES; BI-LAYER; FEATURE SIZES; GRAPHITE STRUCTURES; LOCAL OXIDATION LITHOGRAPHY; NANO PATTERN; NANO SCALE; NANOELECTRONIC DEVICES; NANOPATTERNING; PROCESS PARAMETERS; RELATIVE HUMIDITIES; SYSTEMATIC STUDY; TIP SPEED; WATER MENISCUS; WORKING RANGE;

ATMOSPHERIC HUMIDITY; GRAPHENE; GRAPHITE; LITHOGRAPHY; MICROSCOPES; NANOELECTRONICS;

ANODIC OXIDATION;

EID: 78149306856     PISSN: 19414900     EISSN: 19414919     Source Type: Journal    
DOI: 10.1166/nnl.2010.1081     Document Type: Article

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