Tip-induced local anodic oxidation: Nanolithography and nanobiotechnology

Nanobiotechnology

Volumn 3, Issue 3-4, 2007, Pages 212-222

  Myhra, S ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

Anodic oxidation; Nanobiotechnology; Nanolithography

Indexed keywords

CARBON; DIAMOND; SILICON;

AEROBIC METABOLISM; ARTICLE; CHEMISTRY; DEVICE; ELECTRODE; ELECTRON BEAM; ENVIRONMENT; FILM; GEOMETRY; NANOANALYSIS; NANOBIOTECHNOLOGY; NANOLITHOGRAPHY; OXIDATION; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SCANNING PROBE MICROSCOPY;

EID: 68949219600     PISSN: 15511286     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12030-008-9014-0     Document Type: Article

References (32)

1. G Binnig H Röhrer C Gerber E Weibel 1982 Surface studies by scanning tunnelling microscopy Phys Rev Lett 49 57 61
2. G Binnig CF Quate C Gerber 1986 Atomic force microscope Phys Rev Lett 56 930 933
3. Myhra S. Introduction to scanning probe microscopy. In: Rivière JC, Myhra S, editors. Handbook of surface and interface analysis. New York: Dekker; 1998. p. 395-446.
4. B Bhushan S Sundararajan 1998 Micro/nanoscale friction and wear mechanisms of thin films using atomic force and friction force microscopy Acta Materialia 46 3793 3804
5. JA Watson CL Brown S Myhra GS Watson 2006 Two-dimensional stick-slip on a soft elastic polymer: pattern generation using atomic force microscopy Nanotechnology 17 2581 2589
6. HJ Mamin D Rugar 1992 Thermomechanical writing with an atomic force microscope tip Appl Phys Lett 61 1003 1005
7. U Drechsler N Bürer M Despont U Dürig B Gotsmann F Robin et al. 2003 Cantilevers with nano-heaters for thermomechanical storage application Microelectron Eng 67-68 397 404
8. RD Piner J Zhu F Xu S Hong CA Mirkin 1999 Dip pen nanolithography Science 283 661 663
9. DM Eigler EK Schweizer 1990 Positioning single atoms with a scanning tunneling microscope Nature 344 524 525
10. U Staufer L Scandella R Wiesendanger 1989 Direct writing of nanometer scale structures on glassy metals by the scanning tunneling microscope Z Phys B Condens Matter 77 281 286
11. S Myhra GS Watson 2005 Tip-induced nano-writing/machining of Si and DLC surfaces-"anodic" versus thermal oxidation Appl Phys A 81 487 493
12. Turner PC, Jones CF, Myhra S, Neall FB, Pham DK, St. C Smart R et al. Dissolution mechanisms in oxides and titanate ceramics-electron microscopy and surface analytical studies. In: Dufour L-C, et al, editor. Surfaces and interfaces of ceramic materials. Dordrecht: Kluwer; 1989. p. 663-90.
13. P Avouris T Hertel R Martel 1997 Atomic force microscope tip-induced local oxidation of silicon: kinetics, mechanism, and nanofabrication Appl Phys Lett 71 285 287
14. Morrison SR. Electrochemistry at semiconductor and oxidized metal electrodes. 2nd ed. New York: Plenum; 1984.
15. P Patil Y De Abreu GG Botte 2006 Electrooxidation of coal slurries on different electrode materials J Power Sources 158 368 385
16. RW Coughlin M Farouque 1979 Hydrogen production from coal, water and electrons Nature 279 301 303
17. T Mühl S Myhra 2007 Patterning of a-C DLC films-exploration of an aqueous electro-oxidative mechanism J Phys D: Appl Phys 40 3468 3477
18. JA Dagata J Schneir HH Harary CJ Evans MT Postek J Bennett 1990 Modification of hydrogen-passivated silicon by a scanning tunneling microscope operating in air Appl Phys Letts 56 2001 2003
19. RJM Vullers M Ahlskog M Cannearts C van Haesendonck 1999 The field induced oxidation of Ti structures by AFM with diamond coated tips J Vac Sci Technol B 17 2417 2422
20. SC Minne HT Soh Ph Flueckiger CF Quate 1995 Fabrication of 0.1 μm metal oxide semiconductor field-effect transistors with the atomic force microscope Appl Phys Letts 66 703 705
21. S Myhra 2003 Bias-induced spatially resolved growth and removal of Si-oxide by atomic force microscopy Appl Phys A 76 63 69
22. Paul A. Chemistry of glasses. London: Chapman & Hall; 1982.
23. Sussmann RS, Brandon JR, Pickles CSJ, Whitehead AJ. Review of industrial applications of CVD diamond. In: Winkler MB, Werner M, Fecht H, editors. Proc MicroMat 2000. Berlin: Micromaterials; 2000. p. 129-40.
24. M Maki S Shikama M Komori Y Sakaguchi K Sakuta T Kobayashi 1992 Hydrogenating effect of single-crystal diamond surface Jpn J Appl Phys 31 L1446 L1449
25. H Seo M Tachiki T Banno Y Sumikawa H Umezawa H Kawarada 2002 Investigation of current-voltage characteristics of oxide region induced by atomic force microscope on hydrogen-terminated diamond surface Jpn J Appl Phys 41 4980 4982
26. H Taniuchi H Umezawa T Arima M Tachiki H Kawarada 2001 High-frequency performance of diamond field-effect transistor IEEE Electron Device Lett 22 390 392
27. A Stanishevsky 2001 Patterning of diamond and amorphous carbon films using focused ion beams Thin Solid Films 398-399 560 565
28. K Romero R Stephan G Grasshoff M Mazur H Ruelke K Huy et al. 2005 A novel approach for the patterning and high-volume production of sub-40-nm gates IEEE Trans Semicond Manuf 18 539 545
29. T Mühl S Myhra 2007 Electro-oxidative lithography by STM as a proximity electrode of electrically conducting DLC J Phys Conf Series 61 841 846
30. S Myhra 2005 Tip-induced oxidative nano-machining of conducting diamond-like carbon (DLC) Appl Phys A 80 1097 1104
31. Mühl T, Myhra S. Nano-patterning of barbon-based materials by electron-assisted local oxidation in humid environment. ICN+T 2007; Stockholm, Sweden, July.
32. GS Watson S Myhra JA Watson 2007 Diamond-like-carbon (DLC) master creation for use in soft lithography using the atomic force microscope (AFM) J Phys Conf Ser 61 1246 1250