Fabrication of Ti/TiOx tunneling barriers by tapping mode atomic force microscopy induced local oxidation

Applied Physics Letters

Volumn 71, Issue 12, 1997, Pages 1733-1735

  Irmer, B ^a   Kehrle, M ^a   Lorenz, H ^a   Kotthaus, J P ^a  

^a UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001093456     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120019     Document Type: Article

References (21)

1. D.M. Eigler and E.K. Schweizer, Nature (London) 344, 524 (1990).
2. M. Wendel, S. Kühn, H. Lorenz, J.P. Kotthaus, and M. Holland, Appl. Phys. Lett. 65, 1775 (1994).
3. E.S. Snow, P.M. Campbell, and P.J. McMarr, Appl. Phys. Lett. 63, 749 (1993).
4. R.C. Barrett and C.F. Quate, Ultramicroscopy 42-44, 262 (1992).
5. J. Cortes Rosa, M. Wendel, H. Lorenz, J.P. Kotthaus, M. Thomas, and H. Kroemer (unpublished).
6. J.A. Dagata, J. Schneir, H.H. Harary, C.J. Evans, M.T. Postek, and J. Benett, Appl. Phys. Lett. 56, 2001 (1990).
7. E.S. Snow and P.M. Campbell, Appl. Phys. Lett. 64, 1932 (1994).
8. J.W. Lyding, T.-C. Shen, J.S. Hubacek, J.R. Tucker, and G.C. Abein, Appl. Phys. Lett. 64, 2010 (1994).
9. H. Sugimura, T. Uchida, N. Kitamura, and H. Masuhara, Appl. Phys. Lett. 63, 1288 (1993).
10. E.S. Snow, D. Park, and P.M. Campbell, Appl. Phys. Lett. 69, 269 (1996).
11. D. Wang, L. Tsau, and K.L. Wang, Appl. Phys. Lett. 67, 1295 (1995).
12. Q. Zhong, D. Inniss, K. Kjoller, and V.B. Ellings, Surf. Sci. Lett. 270, L688 (1993).
13. E.S. Snow and P.M. Campbell, Science 270, 1639 (1995).
14. Point probes from Nanosensors GmbH, Germany.
15. M. Kehrle, A. Kriele, B. Irmer, H. Lorenz, and J.P. Kotthaus (unpublished).
16. M. Ishii and K. Matsumoto, Jpn. J. Appl. Phys., Part 1 34, 1329 (1995).
17. An applied external electric field of course also affects the oscillation of the cantilever. As we cannot see a significant change in the amplitude of the oscillation, but do see a mainly static deflection that causes the z piezo to withdraw the tip, the static interpretation given here seems appropriate to our experiment.
18. J. Servat, P. Gorostiza, and F. Sanz, J. Vac. Sci. Technol. A 14, 1208 (1996).
19. 2, corresponding to the transferred charge, and typical exposure times of approximately 2 pA.
20. 2/Ti. The behaviour principle, however, is the same.
21. K. Matsumoto, M. Ishii, K. Segawa, and Y. Oka, Appl. Phys. Lett. 68, 34 (1996).