Effects of the removal of 0.1 μm particles in industrial cleanrooms with a Fan Dry Coil Unit (FDCU) return system

Aerosol and Air Quality Research

Volumn 10, Issue 6, 2010, Pages 571-580

  Lin, Ti ^a   Tung, Yun Chun ^b   Hu, Shih Cheng ^a   Lin, Chen Yen ^a  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NATIONAL TAIWAN NORMAL UNIVERSITY   (Taiwan)

Author keywords

Cleanroom; FDCU (a fan dry coil unit); Particle; Ventilation

Indexed keywords

AIR CHANGE RATES; CONTAMINATION CONTROL; EXPERIMENTAL WORKS; FDCU (A FAN DRY COIL UNIT); PARTICLE; PARTICLE REMOVAL; PLENUM PRESSURE; PRODUCTION LINE; VENTILATION SYSTEMS; VIABLE SOLUTIONS;

CEILINGS; CLEAN ROOMS; DOORS; VENTILATION; WINDOWS;

LABORATORIES;

CLEANUP; PARTICLE SIZE; PERFORMANCE ASSESSMENT; POLLUTANT REMOVAL; PRESSURE EFFECT; VENTILATION;

EID: 78149266787     PISSN: 16808584     EISSN: 20711409     Source Type: Journal    
DOI: 10.4209/aaqr.2010.03.0014     Document Type: Article

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