Dynamic analysis on particle concentration induced by opening the door of a front opening unified pod (FOUP) that loaded with 25 pieces of 300 mm wafer manufacturing processes

Aerosol and Air Quality Research

Volumn 9, Issue 1, 2009, Pages 139-148

  Hu, Shih Cheng ^a   Ku, Chen Wei ^a   Shih, Yang Cheng ^a   Hsu, Kwen ^b  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b TRW Company   (United States)

Author keywords

Clean room; FOUP; Minienvironment; Semiconductor processes

Indexed keywords

AIR QUALITY; POLLUTION;

ENVIRONMENT PRESSURE; FOUP; FRONT-OPENING UNIFIED PODS; MINIENVIRONMENT; PARTICLE CONCENTRATIONS; PRESSURE DIFFERENCES; SEMICONDUCTOR PROCESS; STEPWISE MULTIPLE REGRESSION;

CLEAN ROOMS;

CONCENTRATION (COMPOSITION); EXPERIMENTAL STUDY; INDOOR AIR; NUMERICAL METHOD;

EID: 67449149335     PISSN: 16808584     EISSN: 20711409     Source Type: Journal    
DOI: 10.4209/2008.11.0057     Document Type: Article

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