Performance comparison of axial fan and fan-filter unit (FFU) type clean rooms by CFD

ASHRAE Transactions

Volumn 108 PART 1, Issue , 2002, Pages 1014-1022

  Hu, Shih Cheng ^a   Chuah, Yew Khoh ^a   Huang, Shen Chiang ^a  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CLEAN ROOMS; COMPUTATIONAL FLUID DYNAMICS; ENERGY UTILIZATION; ITERATIVE METHODS; LAMINAR FLOW; PERFORMANCE; PRESSURE DISTRIBUTION;

FAN-FILTER UNIT (FFU);

FANS;

EID: 0036275260     PISSN: 00012505     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)

1. Approaches for improving uniformity in unidirectional flow cleanrooms
2. Clean room and work station requirements
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4. Airflow characteristics in clean rooms
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6. Studies on rationalizing air flow in clean room (Part 1): Airflow pattern in a vertical laminar flow type clean room
7. Studies on the flow in a full down flow clean room and the ceiling chamber configuration
8. Energy-saving design for air-conditioning systems in semiconductor clean rooms
9. Supply plenum and airflow uniformity in cleanrooms
10. Configuration of vertical laminar flow (VLF) type clean room and nonuniformity in airflow profile
11. Studies on rationalizing air flow in clean room (Part 2): Simulation technique of predicting air flow in a vertical laminar flow type clean room by porous medium formulation
12. Laboratory studies of fan-filter unit, FFU