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Volumn 782, Issue , 2003, Pages 63-68
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Monolithic three-dimensional integration of micro-fluidic channels and optical waveguides in fused silica
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Author keywords
[No Author keywords available]
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Indexed keywords
DRYING;
ETCHING;
FLOW OF FLUIDS;
IONIZATION;
LASER PULSES;
OPTICAL WAVEGUIDES;
SCANNING ELECTRON MICROSCOPY;
MICRO-FLUIDIC CHANNELS;
MICROFLUIDICS;
MONOLITHIC THREE-DIMENSIONAL INTEGRATION;
PARALLEL PROCESSING;
FUSED SILICA;
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EID: 2942677300
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-782-a3.2 Document Type: Conference Paper |
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Times cited : (41)
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References (5)
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