Laser-Based fabrication of microflow cytometers with integrated optical waveguides

The Microflow Cytometer

Volumn , Issue , 2010, Pages 287-310

  Dugan, Mark ^a   Said, Ali A ^a   Haddock, Tom ^a   Bado, Philippe ^a   Bellouard, Yves ^b  

^a TRANSLUME INC   (United States)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; LASER PULSES; SILICA;

CYTOMETERS; DIRECT WRITE; FEMTOSECONDS; FLOW CYTOMETERS; INTEGRATED OPTICAL WAVEGUIDES; LASER-BASED FABRICATION; SILICA MONOLITHS; TRADITIONAL MARKETS;

OPTICAL WAVEGUIDES;

EID: 78049330412     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.4032/9789814267687     Document Type: Chapter

References (33)

1. Y. Bellouard, A. Said, M. Dugan and Ph. Bado, Fabrication of high-aspect ratio, microfluidic channels and tunnels using femtosecond laser pulses and chemical etching. Opt. Express 12, 2120-2129 (2004).
2. J. Ihlemann, Excimer laser ablation of fused silica. Appl. Surf. Sci. 54, 193-200 (1992).
3. D. Du, X. Liu, G. Korn, J. Squier and G. Mourou, Laser-induced breakdown by impact ionization in Si02 with pulse widths from 7 ns to 150 fs. Appl. Phys. Lett. 64, 3071-3073 (1994).
4. K. O. Hill, Y. Fujii, D. C. Johnson and B. S. Kawasaki, Photosensitivity in optical fiber waveguides: application to reflection filter fabrication. Appl. Phys. Lett. 32, 647-649 (1978).
5. K. M. Davis, K. Miura, N. Sugimoto and K. Hirao, Writing waveguides in glass with a femtosecond laser. Opt. Lett. 21, 1729-1731 (1996).
6. Ph. Bado, A. A. Said, M. Dugan, T. Sosnowski and S. Wright, Dramatic improvements in waveguide manufacturing with femtosecond lasers. Proceedings of the 18th annual National Fiber Optic Engineers Conference (NFOEC 2002), Dallas (TX), 1153-1158 (2002).
7. J. W. Chan, T. Huser, S. Risbudand and D. M. Krol, Structural changes in fused silica after exposure to focused femtosecond laser pulses. Opt. Lett. 26, 1726-1728 (2001).
8. D. M. Krol, Femtosecond laser modification of glass J. Non-Cryst. Solids 354, 416-424 (2008).
9. Y. Bellouard, E. Barthel, A. A. Said, M. Dugan and Ph. Bado, Scanning thermal microscopy and Raman analysis of bulk fused silica exposed to low energy femtosecond laser pulses. Opt. Express 16, 19520-19534 (2008).
10. N. Kitamura, Y. Toguchi, S. Funo, H. Yamashita and M. J. Kinoshita, Refractive-index of densified silica glass. J. Non-Cryst. Solids 159, 241-245 (1993).
11. Y. Kondo, T. Suzuki, H. Inouye, K. Miura, T. Mitsuyu and K. Hirao, Three-dimensional microscopic crystallization in photosensitive glass by femtosecond laser pulses at nonresonant wavelength. Jpn. J. Appl. Phys. 37, 94-96 (1998).
12. A. Marcinkevičius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa and J. Nishii, Femtosecond Laser-assisted three-dimensional microfabrication in silica. Opt. Lett. 26, 277-279 (2001).
13. Y. Bellouard, A. Said, M. Dugan and Ph. Bado, Monolithic three-dimensional integration of micro-fluidic channels and optical waveguides in fused silica. MRS Proceedings 782, Boston (2003).
14. P. B. Howell, D. R. Mott, S. Fertig, C. R. Kaplan, J. P. Golden, E. S. Oran and F. S. Ligler, A microfluidic mixer with grooves placed on top and bottom of the channel. Lab Chip 5, 524-530 (2005).
15. A. D. Stroock, S. K.W. Dertinger, A. Ajdari, I. Mezic, H. A. Stone and G.M. Whitesides, Chaotic mixer for microchannels. Science 295, 647-651 (2002).
16. P. B. Howell, J. P. Golden, L. R. Hilliard, J. S. Erickson, D. R. Mott and F. S. Ligler, Two simple and rugged designs for creating microfluidic sheath flow. Lab Chip 8, 1097-1103 (2008).
17. H. M. Shapiro, Practical Flow Cytometry. John Wiley (2003).
18. H. M. Shapiro and M. Hercher, Flow cytometers using optical wave-guides in place of lenses for specimen illumination and light collection. Cytometry 7, 221-223 (1986).
19. G. B. Lee, C. H. Lin and G. L. Chang, Micro flow cytometers with buried su-8/sog optical waveguides. Sensors And Actuators A-Physical 103, 165-170 (2003).
20. R. W. Applegate, J. Squier, T. Vestad, J. Oakey and D. W. M. Marr, Optical trapping, manipulation, and sorting of cells and colloids inmicrofluidic systemswith diode laser bars. Optics Express 12, 4390 (2004).
21. H. Sugiura and T. Yamadaya, Raman-scattering in silica glass in the permanent densification region. J. Non-Cryst. Solids 144, 151-158 (1992).
22. P. Oberson, B. Gisin, B. Huttner and N. Gisin, Refracted near-field measurements of refractive index and geometry of silica-on-silicon integrated optical waveguides. Appl. Opt. 37, 7268-7272 (1998).
23. P. A. Temple, W. H. Lowdermilk and D. Milam, Carbon dioxide laser polishing of fused silica surfaces for increased laser-damage resistance at 1064 nm. Appl. Optics 21, 3249-3255 (1982).
24. Y. M. Xiao and M. Bass, Thermal stress limitations to laser fire polishing of glasses. Appl. Optics 22, 2933-2936 (1983).
25. K. M. Nowak, H. J. Baker and D. R. Hall, Efficient laser polishing of silica micro-optic components. Appl. Optics 45, 162-171 (2006).
26. T. W. Hobbs, M. Edwards and R. VanBrocklin, Current fabrication techniques for ULE and fused silica lightweight mirrors. Proceedings of SPIE Vol. 5179 Optical Materials and Structures Technologies, Ed.William A. Goodman SPIE, Bellingham, WA, 1-11 (2003).
27. I. Miyamoto, A. Horn, J. Gottmann, D. Wortmann and F. Yoshino, Fusion welding of glass using femtosecond laser pulses with high-repetition rates. J. of Laser Micro/ Nanoengineering 2, 57-63 (2007).
28. Y. Bellouard, A. Said and Ph. Bado, Integrating optics and micro-mechanics in a single substrate: A step toward monolithic integration in fused silica. Opt. Express 13, 6635-6644 (2005).
29. R. W. Applegate, J. Squier, T. Vestad, J. Oakey, D. W. M. Marr, Ph. Bado, M. A. Dugan and A. Said, Microfluidic sorting system based on optical waveguide integration and diode laser bar trapping. Lab Chip 6, 422-426 (2006).
30. C. Grenvall, P. Augustsson, H. Matsuoka and T. Laurell, Multiple node ultrasonic standing wave separation in microchannels improves lipid discrimination from complex bio-suspensions. The Proceedings of the MicroTAS Conference, San Diego, paper M41A, (2008).
31. R. A. Myers, N. Mukherjee and S. R. J. Brueck, Large second-order nonlinearity in poled fused silica. Opt. Lett. 16, 1732-1734 (1991).
32. G. Li, K. A. Winick, A. A. Said, M. Dugan and Ph. Bado, Waveguide electro-optic modulator in fused silica fabricated by femtosecond laser direct writing and thermal poling. Optics Lett. 31, 739-741 (2006).
33. R. Haight, P. Longo and A. Wagner, Metal depositionwith femtosecond light pulses at atmospheric pressure. J. Vacuum Science and Technology A 21, 649-652 (2003).