Efficient laser polishing of silica micro-optic components

Applied Optics

Volumn 45, Issue 1, 2006, Pages 162-171

  Nowak, Krzysztof M ^a   Baker, Howard J ^a   Hall, Denis R ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; LASER BEAMS; MICROMETERS; MICROOPTICS; PRODUCTION CONTROL; SILICA; SURFACE ROUGHNESS;

BEAM SHAPING; MASS FLOW; RASTER SCAN; SUBSTRATE PREHEATING; SURFACE SMOOTHING;

LASER ABLATION;

EID: 30844468864     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.000162     Document Type: Article

References (16)

1. F. Laguarta, N. Lupon, and J. Armengol, "Optical-glass polishing by controlled laser surface-heat treatment," Appl. Opt. 33, 6508-6513 (1994).
2. J. F. Monjardin, K. M. Nowak, A. R. Holdsworth, H. J. Baker, and D. R. Hall, "Brightness improvement for micro-lensed, laser diode bar stacks," presented at Advanced Solid-State Photonics Topical Meeting, San Antonio, Tex., 2-5 February 2003.
3. 2 laser treatment for mitigation of damage growth in fused silica," presented at the Boulder Laser Damage Symposium XXXIII, Boulder, Colo, 1-3 October 2001.
4. 2 laser cleaning and damage repair of silica optical surfaces," presented at the Boulder Laser Damage Symposium XXXVI, Boulder, Colo, 20-22 September 2004.
5. P. A. Temple, W. H. Lowdermilk, and D. Milam, "Carbon-dioxide laser polishing of fused-silica surfaces for increased laser-damage resistance at 1064 nm," Appl. Opt. 21, 3249-3255 (1982).
6. Y. M. Xiao and M. Bass, "Thermal-stress limitations to laser fire polishing of glasses," Appl. Opt 22, 2933-2936 (1983).
7. F. Vega, N. Lupon, J. A. Cebrian and F. Laguarta, "Laser application for optical glass polishing," Opt. Eng. 37, 272-279 (1998).
8. D. G. Holloway, The Physical Properties of Glasses (Wykeham Publications, 1973), pp. 19-20.
9. J. L. Ocana, A. Garcia-Beltran, F. Laguarta, J. Armengol, N. Lupon, and F. Vega, "Laser heat treatments driven by integrated beams: role of irradiation nonuniformities," Appl. Opt 38, 4570-4576 (1999).
10. J. Hentze and V. Lissotschenko, "Method and device for the production of optical lenses or the like," U.S. patent 5,504,302 (2 April 1996).
11. V. P. Veiko, "Laser-based technology for micro-optics and photonics components fabrication," in International Symposium on Photonic Glass, C. Zhu, ed., Proc. SPIE 5061, 103-111 (2003).
12. G. A. J. Markillie, H. J. Baker, F. J. Villarreal, and D. R. Hall, "Effect of vaporization and melt ejection on laser machining of silica glass micro-optical components," Appl. Opt 41, 5660-5667 (2002).
13. L. K. White, N. A. Miszkowski, W. A. Kurylo, and J. M. Shaw, "Flow properties and contour modeling of fusible borophosphosilicate glasses," J. Electrochem. Soc., 139, 822-826 (1992).
14. A. Paul, Chemistry of Glasses (Chapman & Hall, 1982), pp. 75, 88.
15. 2 laser wavelengths," Appl. Opt. 26, 1728-1731 (1987).
16. L. Holland, The Properties of Glass Surfaces (Chapman & Hall, 1966).