Micro flow cytometers with buried SU-8/SOG optical waveguides

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 165-170

  Lee, Gwo Bin ^a   Lin, Che Hsin ^b   Chang, Guan Liang ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Flow cytometer; Optical fiber; Spin on glass (SOG); SU 8; Waveguide

Indexed keywords

ETCHING; FLOW MEASUREMENT; GLASS; MICROMACHINING; OPTICAL FIBERS; OPTICAL WAVEGUIDES;

CYTOMETERS;

ACTUATORS;

EID: 0037438915     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00305-9     Document Type: Conference Paper

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