Development of a highly sensitive porous Si-based hydrogen sensor using Pd nano-structures

Sensors and Actuators, B: Chemical

Volumn 111-112, Issue SUPPL., 2005, Pages 125-129

  Luongo, Kevin ^a,b   Sine, Altagrace ^a,b   Bhansali, Shekhar ^a,b  

^a University of South Florida   (United States)

^b UNIVERSITY OF SOUTH FLORIDA   (United States)

Author keywords

Gas sensor; Impedance; Palladium; PD nanoparticles; Porous Si

Indexed keywords

IMPEDANCE; PD NANOPARTICLES; ROOM TEMPERATURE;

ANNEALING; CHEMICAL SENSORS; CONCENTRATION (PROCESS); ELECTRIC RESISTANCE; ETCHING; NANOSTRUCTURED MATERIALS; PALLADIUM; TEMPERATURE DISTRIBUTION; THIN FILMS;

POROUS SILICON;

EID: 25144514029     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.06.056     Document Type: Conference Paper

References (5)

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3. M. Zach, K. Ng, and R. Penner Molybdenum nanowires by electrodeposition Science 290 2000 2120 2123
4. V. Polishchuk, E. Souteyrand, J. Martin, V. Strikha, and V. Skryshevsky A study of hydrogen detection with palladium modified porous silicon Anal. Chim. Acta 375 1998 205 210
5. K. Luongo, S. Aravamudhan, and S. Bhansali A novel approach to integrating nanowires to transductors, without surface contamination" Proceedings of the IMAPS Fifth Topical Technology Workshop on MEMS, Related Microsystems and Nanopackaging Boston, November 20-22 2003