Nanometer biodevice fabrication by electron beam lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2892-2896

  Di Fabrizio, Enzo ^a   Grella, Luca ^a   Baciocchi, Marco ^a   Gentili, Massimo ^a   Ascoli, Cesare ^b   Cappella, Brunero ^b   Frediani, Carlo ^b   Morales, Piero ^c  

^a CNR   (Italy)

^b CNR Consiglio Nazionale delle Ricerche   (Italy)

^c ENEA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000232064     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589751     Document Type: Article

References (8)

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