Mechanical properties of Al2O3-doped (2 wt.%) ZnO films

Thin Solid Films

Volumn 515, Issue 24 SPEC. ISS., 2007, Pages 8594-8597

  Kuriki, Shina ^a   Kawashima, Toshitaka ^a  

^a SONY CORPORATION   (Japan)

Author keywords

Adhesion; Mechanical properties; Nanoindentation; Transparent conductive oxide; ZnO:Al

Indexed keywords

ADHESION; ALUMINA; FRACTURE; MAGNETRON SPUTTERING; NANOINDENTATION; POLYETHYLENE TEREPHTHALATES;

REACTIVE GAS-FLOW RATIOS; SPUTTERING POWER; TRANSPARENT CONDUCTIVE OXIDES;

PLASTIC FILMS;

EID: 34548860095     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.04.005     Document Type: Article

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