A planar PDMS micropump using in-contact minimized-leakage check valves

Journal of Micromechanics and Microengineering

Volumn 20, Issue 9, 2010, Pages

  Ni, Junhui ^a,b   Huang, Fengliang ^b,c   Wang, Bin ^b   Li, Beizhi ^a   Lin, Qiao ^b  

^a DONGHUA UNIVERSITY   (China)

^b Columbia University ^*  (United States)

^c NANJING NORMAL UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACCURATE ANALYSIS; BACK PRESSURES; CHECK VALVES; DEVICE GEOMETRIES; DIVERSE APPLICATIONS; EXPERIMENTAL CHARACTERIZATION; IN-PLANE; LAB-ON-A-CHIP SYSTEMS; LEAKAGE FLOW; LUMPED-PARAMETER; MAXIMUM FLOW RATE; MICRO PUMP; OPERATING PARAMETERS; POLYDIMETHYLSILOXANE PDMS; PUMP CHAMBERS; SIMPLE STRUCTURES; SINGLE LAYER; SYSTEM INTEGRATION; THEORETICAL MODELS; THIN MEMBRANE;

FREQUENCY RESPONSE; LEAKAGE (FLUID); MICROCHANNELS;

PUMPS;

EID: 77957853309     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/9/095033     Document Type: Article

References (32)

1. Gardeniers J G E and van den Berg A 2004 Lab-on-a-chip systems for biomedical and environmental monitoring Anal. Bioanal. Chem. 378 1700-3
2. Laser D J and Santiago J G 2004 A review of micropumps J. Micromech. Microeng. 14 R35-64
3. Whitesides G M 2006 The origins and the future of microfluidics Nature 442 368-73
4. Jang J and Lee S S 2000 Theoretical and experimental study of MHD (magnetohydrodynamic) micropump Sensors Actuators A 80 84-9
5. Wang P, Chen Z and Chang H-C 2006 A new electro-osmotic pump based on silica monoliths Sensors Actuators B 113 500-9
6. van Lintel H T G, van de Pol F C M and Bouwstra S 1988 A piezoelectric micropump based on micromachining of silicon Sensors Actuators 15 153-67
7. van de Pol F C M, van Lintel H T G, Elwenspoek M and Fluitman J H J 1990 A thermopneumatic micropump based on micro-engineering techniques Sensors Actuators A 21 198-202
8. Zengerle R, Ulrich J, Kluge S, Richter M and Richter A 1995 A bidirectional silicon micropump Sensors Actuators A 50 81-6
9. Koch M, Harris N, Evans A G R, White N M and Brunnschweiler A 1998 A novel micromachined pump based on thick-film piezoelectric actuation Sensors Actuators A 70 98-103
10. Maillefer D, van Lintel H, Rey-Memet G and Hirschi R 1999 A high-performance silicon micropump for an implantable drug delivery system Proc. 12th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS '99) (Orlando, FL, USA) pp 541-6
11. Cunneen J, Lin Y-C, Caraffini S, Boyd J G, Hesketh P J, Lunte S M and Wilson G S 1998 A positive displacement micropump for microdialysis Mechatronics 8 561-83
12. Bohm S, Olthuis W and Bergveld P 1999 A plastic micropump constructed with conventional techniques and materials Sensors Actuators A 77 223-8
13. Feng G-H and Kim E S 2005 Piezoelectrically actuated dome-shaped diaphragm micropump J. Microelectromech. Syst. 14 192-9
14. Meng E, Wang X-Q, Mak H and Tai Y-C 2000 A check-valved silicone diaphragm pump Proc. 13th Annu. Int. Conf. on Micro Electro Mechanical Systems (MEMS 2000) (Miyazaki, Japan) pp 62-7
15. Pan T, McDonald S J, Kai E M and Ziaie B 2005 A magnetically driven PDMS micropump with ball check-valves J. Micromech. Microeng. 15 1021-6
16. Yin H-L, Huang Y-C, Fang W and Hsieh J 2007 A novel electromagnetic elastomer membrane actuator with a semi-embedded coil Sensors Actuators A 139 194-202
17. Kim J H, Lau K T, Shepherd R, Wu Y, Wallace G and Diamond D 2008 Performance characteristics of a polypyrrole modified polydimethylsiloxane (PDMS) membrane based microfluidic pump Sensors Actuators A 148 239-44
18. Kim J-H, Kang C J and Kim Y-S 2004 A disposable polydimethylsiloxane- based diffuser micropump actuated by piezoelectric-disc Microelectron. Eng. 71 119-224
19. Kim J-H, Na K-H, Kang C J and Kim Y-S 2005 A disposable thermopneumatic-actuated micropump stacked with PDMS layers and ITO-coated glass Sensors Actuators A 120 365-9
20. Yoo J-C, Choi Y J, Kang C J and Kim Y-S 2007 A novel polydimethylsiloxane microfluidic system including thermopneumatic-actuated micropump and paraffin-actuated microvalve Sensors Actuators A 139 216-20
21. Woias P 2005 Micropumps-past, progress and future prospects Sensors Actuators B 105 28-38
22. Schluter M, Kampmeyer U, Tahhan I and Lilienhof H-J 2002 A modular structured, planar micro pump with No Moving Part (NMP) valve for fluid handling in microanalysis systems Proc. 2nd Annu. Int. IEEE-EMBS Special Topic Conf. on Microtechnologies in Medicine & Biology (Madison, WI) pp 500-3
23. Zimmermann S, Frank J A, Liepmann D and Pisano A P 2004 A planar micropump utilizing thermopneumatic actuation and in-plane flap valves Proc. 17th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS) pp 462-5
24. Kim J, Baek J, Lee K, Park Y, Sun K, Lee T and Lee S 2006 Photopolymerized check valve and its integration into a pneumatic pumping system for biocompatible sample delivery Lab Chip 6 1091-4
25. Yang B and Lin Q 2007 Planar micro-check valves exploiting large polymer compliance Sensors Actuators A 134 186-93
26. Duffy D C, McDonald J C, Schueller O J A and Whitesides G M 1998 Rapid prototyping of microfluidic systems in poly(dimethylsiloxane) Anal. Chem. 70 4974-84
27. Jo B-H, Lerberghe L M V, Motsegood K M and Beebe D J 2000 Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer J. Microelectromech. Syst. 9 76-81
28. Hamrock B J 1994 Fundamentals of Fluid Film Lubrication (New York: McGraw-Hill)
29. Xie J, Shih J, Lin Q, Yang B and Tai Y-C 2004 Surface micromachined electrostatically actuated micro peristaltic pump Lab Chip 4 495-501
30. Fuard D, Tzvetkova-Chevolleau T, Decossas S, Tracqui P and Schiavone P 2008 Optimization of poly-di-methyl-siloxane (PDMS) substrates for studying cellular adhesion and motility Microelectron. Eng. 85 1289-93
31. Xu G, Ting D N, Luar V and Saw L K 2003 A disposable self-priming and bubble tolerance pneumatic actuation micro-pump Int. J. Comput. Eng. Sci. 4 253-6
32. Wang C-H and Lee G-B 2006 Pneumatically driven peristaltic micropumps utilizing serpentine-shape channels J. Micromech. Microeng. 16 341-8