High-performance silicon micropump for an implantable drug delivery system

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 541-546

  Maillefer, Didier ^a   van Lintel, Harald ^a   Rey Mermet, Gilles ^a   Hirschi, Roland ^a  

^a DEBIOTECH SA   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CONTROLLED DRUG DELIVERY; DRUG INFUSION; MICROMACHINING; PIEZOELECTRIC DEVICES; SILICON; VISCOSITY OF LIQUIDS;

IMPLANTABLE DRUG DELIVERY SYSTEMS; SILICON PIEZOELECTRIC MICROPUMPS; SILICON PYREX ANODIC BONDING;

MICROELECTROMECHANICAL DEVICES;

EID: 0032674333     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)