A planar micropump utilizing thermopneumatic actuation and in-plane flap valves

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 462-465

  Zimmermann, S ^a,b   Frank, J A ^a,c   Liepmann, D ^a,b   Pisano, A P ^a,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b University of California at Berkeley   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW RATE; FLUIDIC-RESISTANCE; POWER CONSUMPTION; THERMOPNEUMATIC ACTUATION;

BUBBLE FORMATION; FLUIDIC DEVICES; HEATING; MASKS; PARAMETER ESTIMATION; PNEUMATIC CONTROL; PRESSURE EFFECTS; PUMPING (LASER); SEALING (CLOSING); SEPARATION;

PUMPS;

EID: 3042742397     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2003.1189786     Document Type: Conference Paper

References (7)

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4. J.A. Frank, A.P. Pisano, "Low-Leakage Micro Gate Valves", in Digest Tech. Papers Transducers '03 Conference, Boston, USA, June 8-12, 2003, pp. 143-146.
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7. S. Zimmermann, D. Fienbork, B. Stoeber, A.W. Flounders, D. Liepmann, "A Microneedle-Based Continuous Glucose Monitor: Fabricated on a Wafer-Level Using In-Device Enzyme Immobilization", in Digest Tech. Papers Transducers '03 Conference, Boston, USA, June 8-12, 2003, pp. 99-102.