A disposable thermopneumatic-actuated micropump stacked with PDMS layers and ITO-coated glass

Sensors and Actuators, A: Physical

Volumn 120, Issue 2, 2005, Pages 365-369

  Kim, Jin Ho ^a   Na, Kwang Ho ^a   Kang, C J ^a   Kim, Yong Sang ^a  

^a Myong Ji University   (South Korea)

Author keywords

Diffuser; Flow rate; ITO heater; Micropump; PDMS

Indexed keywords

COATINGS; ELECTRIC RESISTANCE; FABRICATION; GLASS; INDIUM COMPOUNDS; ORGANIC COMPOUNDS;

DIFFUSER; FLOW RATE; ITO HEATER; MICROPUMP; PDMS;

ACTUATORS;

EID: 17644400484     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.12.024     Document Type: Article

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