Planar micro-check valves exploiting large polymer compliance

Sensors and Actuators, A: Physical

Volumn 134, Issue 1, 2007, Pages 186-193

  Yang, Bozhi ^a   Lin, Qiao ^b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b Columbia University ^*  (United States)

Author keywords

Check valves; Compliance; Flow control; Lab on a chip; Microfluidics

Indexed keywords

ELASTOMERS; FABRICATION; FLOW CONTROL; FLUIDICS; PRESSURE EFFECTS;

CHECK VALVES; MICROCHANNEL; MICROFLUIDICS; POLYDIMETHYLSILOXANE;

POLYMER BLENDS;

EID: 33847296185     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.07.016     Document Type: Article

References (27)

1. Kovacs G.T.A. Micromachined Transducers Sourcebook (1998), WCB/McGraw-Hill, Boston
2. Shoji S., and Esashi M. Microflow devices and systems. J. Micromech. Microeng. 4 (1994) 157-171
3. Nguyen N.T., and Wereley S.T. Fundamentals and Applications of Microfluidics (2002), Artech House, Boston
4. Wang X.Q., Lin Q., and Tai Y.C. A parylene micro-check valve. Proceedings of the 12th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS '99). Orlando, FL, January 17-21 (1999) 177-182
5. Rapp R., Schomburg W.K., Maas D., Schulz J., and Stark W. LIGA micropump for gases and liquids. Sens. Actuators A: Phys. 40 (1994) 57-61
6. Schomburg W.K., Vollmer J., Bustgens B., Fahrenberg J., Hein H., and Menz W. Microfluidic components in LIGA technique. J. Micromech. Microeng. 4 4 (1994) 186-191
7. Boehm S., Olthuis W., and Bergveld P. A plastic micropump constructed with conventional techniques and materials. Sens. Actuators A: Phys. A77 (1999) 223-238
8. Nguyen N.T., Truong T.Q., Wong K.K., Ho S.S., and Low C.L.N. Micro-check valves for integration into polymeric microfluidic devices. J. Micromech. Microeng. 14 1 (2004) 69-75
9. Yang X., Grosjean C., Tai Y.C., and Ho C.M. A MEMS thermopneumatic silicone membrane valve. Proceedings of the 10th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS '97). Nagoya, Japan, January 26-30 (1997) 114-118
10. Hosokawa K., and Maeda R. A pneumatically-actuated three-way microvalve fabricated with polydimethylsiloxane using the membrane transfer technique. J. Micromech. Microeng. 10 (2000) 415-420
11. Hosokawa K., and Maeda R. Low-cost technology for high-density microvalve arrays using polydimethylsiloxane (PDMS). Proceedings of the 14th IEEE International Conference on MEMS (MEMS '01). Interlaken, Switzerland, January 21-25 (2001) 531-534
12. Unger M.A., Chou H.P., Thorsen T., Scherer A., and Quake S.R. Monolithic microfabricated valves and pumps by multilayer soft lithography. Science 288 (2000) 113-116
13. Jo B.H., Moorthy J., and Beebe D.J. Polymer microfluidic valves, membranes and coatings. Proceedings of the 13th International Conference on Micro Total Analysis Systems (MicroTAS '00). Enschede, Netherlands, May 14-18 (2000) 335-338
14. Jeon N.L., Chiu D.T., Wargo C.J., Wu H.K., Choi I.S., Anderson J.R., and Whitesides G.M. Microfluidics section: design and fabrication of integrated passive valves and pumps for flexible polymer 3-dimensional microfluidic systems. Biomed. Microdevices 4 (2002) 117-121
15. Stemme E., and Stemme G. A valveless diffuser/nozzle-based fluid pump. Sens. Actuators A 39 (1993) 159-167
16. Seidemann V., Butefisch S., and Buttgenbach S. Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers. Sens. Actuators A 97-8 (2002) 457-461
17. Hasselbrink Jr. E.F., Shepodd T.J., and Rehm J.E. High-pressure microfluidic control in lab-on-a-chip devices using mobile polymer monoliths. Anal. Chem. 74 (2002) 4913-4918
18. Kim D., and Beebe D.J. In situ fabricated micro-check-valve utilizing the spring force of a hydrogel. Proceedings of the Seventh International Conference on Micro Total Analysis Systems (MicroTAS '03). Squaw Valley, CA, October 5-9 (2003) 527-530
19. Frank J.A., and Pisano A.P. Low-leakage micro-gate valves. Proceedings of the 12th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers '03). Boston, June 8-12 (2003) 143-146
20. Yang B., and Lin Q. Planar micro-check valves utilizing large compliance of PDMS. ASME IMECE 2005-81958, 2005 International Mechanical Engineering Conference & Exhibition (ASME IMECE '05). Orlando, FL, November 5-15 (2005)
21. Duffy D.C., McDonald J.C., Schueller O.J.A., and Whitesides G.M. Rapid prototyping of microfluidic systems in poly(dimethylsiloxane). Anal. Chem. 70 (1998) 4974-4984
22. Jo B.H., Lerberghe L.M.V., Motsegood J.N., and Beebe D.J. Three-dimensional micro-channel fabrication in poly-dimethylsiloxane (PDMS) elastomer. J. Microelectromech. Syst. 9 (2000) 76-81
23. Armani D., Liu C., and Aluru N. Re-configurable fluid circuits by PDMS elastomer micromachining. Proceeding of the 12th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS '99). Orland, FL, January 17-21 (1999) 222-227
24. Park D.S.W., Kim K., Pillans B., and Lee J.B. Polydimethylsiloxane-based pattern transfer process for the post-IC integration of MEMS onto CMOS chips. J. Micromech. Microeng. 14 (2004) 335-340
25. Hamrock B. Fundamentals of Fluid Film Lubrication (1994), McGraw-Hill, New York
26. Timoshenko S., et al. Theory of Plates and Shells. 2nd ed. (1959), McGraw-Hill, New York
27. Leissa A.W. Vibration of Plates (1969), Government Printing Office, Washington, DC, USA