Integrity of micro-hotplates during high-temperature operation monitored by digital holographic microscopy

Journal of Microelectromechanical Systems

Volumn 19, Issue 5, 2010, Pages 1175-1179

  Lai, Y W ^a   Koukourakis, N ^a   Gerhardt, N C ^a   Hofmann, M R ^a   Meyer, R ^a   Hamann, S ^a   Ehmann, M ^a   Hackl, K ^a   Darakis, E ^b   Ludwig, A ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b Chania International Airport   (Greece)

Author keywords

Digital holography; micro hotplates; microelectromechanical systems integrity; surface topography

Indexed keywords

DIGITAL HOLOGRAPHIC MICROSCOPY; DIGITAL HOLOGRAPHY; FIRST CYCLE; IN-SITU; MEMBRANE THICKNESS; MICROELECTROMECHANICAL SYSTEMS INTEGRITY; MICROHOTPLATES; NANOMETER-SCALE RESOLUTION; OUT-OF-PLANE; PERMANENT DEFORMATIONS; SURFACE EVOLUTION;

COMPOSITE MICROMECHANICS; COMPUTER GENERATED HOLOGRAPHY; DEFORMATION; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROLENSES; PHASE MEASUREMENT; TOPOGRAPHY;

SURFACE TOPOGRAPHY;

EID: 77957568514     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2067442     Document Type: Article

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