A digital holographic microscope for complete characterization of microelectromechanical systems

Measurement Science and Technology

Volumn 15, Issue 3, 2004, Pages 529-539

  Coppola, G ^a   Ferraro, P ^b   Iodice, M ^a   De Nicola, S ^c   Finizio, A ^c   Grilli, S ^b  

^a Istituto per la Microelettronica e Microsistemi   (Italy)

^b ISTITUTO NAZIONALE DI OTTICA   (Italy)

^c CNR   (Italy)

Author keywords

3D shape measurement; Digital holography; MEMS characterization; Surface profiling

Indexed keywords

CHARACTERIZATION; DEFORMATION; HOLOGRAPHY; MICROSTRUCTURE; RESIDUAL STRESSES;

DIGITAL HOLOGRAPHIC MICROSCOPY (DHM); NON-INVASIVE TECHNIQUES;

MICROELECTROMECHANICAL DEVICES;

MICROELECTROMECHANICAL SYSTEM; MICROSCOPY;

EID: 1842535916     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/15/3/005     Document Type: Article

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