Morphology control of tungsten nanorods grown by glancing angle RF magnetron sputtering under variable argon pressure and flow rate

Physics Letters, Section A: General, Atomic and Solid State Physics

Volumn 374, Issue 43, 2010, Pages 4430-4437

  Khedir, Khedir R ^a   Kannarpady, Ganesh K ^a   Ishihara, Hidetaka ^a   Woo, Justin ^a   Ryerson, Charles ^b   Biris, Alexandru S ^a  

^a UNIVERSITY OF ARKANSAS AT LITTLE ROCK   (United States)

^b US Army Engineer Research and Development Center   (United States)

Author keywords

Glancing angle deposition; Morphology control; Phase transformation; RF magnetron sputtering; Tungsten nanorods

Indexed keywords

ARGON; MAGNETRON SPUTTERING; NANORODS; PHASE TRANSITIONS; SUPERHYDROPHOBICITY; SURFACE ROUGHNESS;

CRYSTALLINE PHASIS; GLANCING ANGLE; GLANCING ANGLE DEPOSITION; MORPHOLOGY CONTROL; RF MAGNETRON SPUTTERING TECHNIQUE; RF-MAGNETRON SPUTTERING; SUPERHYDROPHOBIC COATINGS; THERMODYNAMICALLY STABLE;

MORPHOLOGY;

EID: 77956962767     PISSN: 03759601     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physleta.2010.08.066     Document Type: Article

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