Microstructure and mechanical properties of nanocrystalline tungsten thin films

Journal of Materials Science and Technology

Volumn 26, Issue 1, 2010, Pages 87-92

  Sun, H L ^a   Song, Z X ^a   Guo, D G ^a   Ma, F ^a   Xu, K W ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Hardness; Microstructure; Modulus; Nanoindentation; Tungsten film

Indexed keywords

ELECTRON MICROSCOPY; ENAMELS; FIELD EMISSION MICROSCOPES; HARDNESS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MICROSTRUCTURE; NANOCRYSTALS; NANOINDENTATION; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN; X RAY DIFFRACTION;

FIELD EMISSION SCANNING ELECTRON MICROSCOPY; HARDNESS AND MODULUS; HARDNESS ENHANCEMENT; MICROSTRUCTURE AND MECHANICAL PROPERTIES; MODULUS; SI (100) SUBSTRATE; TUNGSTEN FILMS; TUNGSTEN THIN FILMS;

THIN FILMS;

EID: 77949560878     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1005-0302(10)60014-X     Document Type: Article

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