XRD line profile analysis of tungsten thin films

Vacuum

Volumn 80, Issue 1-3, 2005, Pages 151-158

  Djerdj, I ^a   Tonejc, A M ^a   Tonejc, A ^a   Radic N ^b  

^a UNIVERSITY OF ZAGREB   (Croatia)

^b RUDER BO KOVI INSTITUTE   (Croatia)

Author keywords

Phase composition; Tungsten thin film; X ray diffraction

Indexed keywords

MAGNETRON SPUTTERING; PHASE COMPOSITION; RESIDUAL STRESSES; STRAIN; SUBSTRATES; TUNGSTEN; X RAY DIFFRACTION;

DOMAIN SIZE; MICROSTRAIN; RIETVELD METHOD; TUNGSTEN THIN FILMS;

THIN FILMS;

EID: 25444450745     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.08.017     Document Type: Conference Paper

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