Characteristics of sculptured Cu thin films and their optical properties as a function of deposition rate

Applied Surface Science

Volumn 255, Issue 18, 2009, Pages 8041-8047

  Savaloni, H ^a   Babaei, F ^a   Song, S ^b   Placido, F ^b  

^a UNIVERSITY OF TEHRAN   (Iran)

^b UNIVERSITY OF THE WEST OF SCOTLAND   (United Kingdom)

Author keywords

AFM; Bruggeman effective medium approximation; Sculptured thin films; SEM; XRD

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION RATES; NANOSTRUCTURES; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION;

BRUGGEMAN EFFECTIVE MEDIUM APPROXIMATION; COPPER THIN FILM; FILM STRUCTURE; GLASS SUBSTRATES; METAL INCLUSIONS; REAL AND IMAGINARY; SCULPTURED THIN FILMS; SPECTRAL RANGE;

OPTICAL FILMS;

EID: 67549104861     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.05.011     Document Type: Article

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