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Rapid Communications in Mass Spectrometry

Volumn 24, Issue 20, 2010, Pages 2949-2956

Cracking study of pentakis(dimethylamino)tantalum vapors by Knudsen cell mass spectrometry

(4) Violet, Perrine a Nuta, Ioana a Chatillon, Christian a Blanquet, Elisabeth a

a CNRS (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; CRACKS; CYTOLOGY; MASS SPECTROMETRY; MOLECULES; ORGANOMETALLICS; OXYGEN; TANTALUM; TANTALUM COMPOUNDS;

ATOMIC-LAYER DEPOSITION; CHEMICAL BEHAVIOR; CHEMICAL VAPOR DEPOSITION PROCESS; CHEMICAL VAPOUR DEPOSITION; DEPOSITION TEMPERATURES; GAS-PHASES; GASEOUS PRECURSORS; KNUDSEN CELL/MASS SPECTROMETRY; ORGANO-METALLIC MOLECULES; THERMALLY UNSTABLE;

CELLS;

EID: 77956911869 PISSN: 09514198 EISSN: 10970231 Source Type: Journal
DOI: 10.1002/rcm.4727 Document Type: Article

Times cited : (6)

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