SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 518, Issue 24, 2010, Pages 7483-7486

Cathodic arc plasma deposited TiAlSiN thin films using an Al-15 at.% Si cathode

(2) Kim, Sun Kyu a Van Le, Vinh b

a University of Ulsan (South Korea)

b HANOI UNIVERSITY OF SCIENCE AND TECHNOLOGY (Viet Nam)

Author keywords

Cathodic arc plasma deposition; Multilayered structures; TiAlSiN thin films

Indexed keywords

ARC CURRENT; CATHODIC ARC PLASMA; CATHODIC ARC PLASMA DEPOSITION; CATHODIC ARC PLASMA DEPOSITION SYSTEM; MAXIMUM HARDNESS; MULTI-LAYERED STRUCTURE; NANOCRYSTALLINES; STEEL SUBSTRATE; SUBSTRATE BIAS VOLTAGES; TIALSIN; TIN LAYERS;

ALUMINUM; BIAS VOLTAGE; DEPOSITION; ELECTRIC ARCS; HARDNESS; MECHANICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES; THIN FILMS; TITANIUM NITRIDE; TOOL STEEL; VAPOR DEPOSITION;

PLASMA DEPOSITION;

EID: 77956881086 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.05.029 Document Type: Conference Paper

Times cited : (30)

References (23)

1
- 0028377730
- H. Ljungcrantz, L. Huttman, J.-E. Sundgren, G. Hakansson, and L. Karlsson Surf. Coat. Technol. 63 1994 123
- (1994) Surf. Coat. Technol. , vol.63 , pp. 123
- Ljungcrantz, H.¹ Huttman, L.² Sundgren, J.-E.³ Hakansson, G.⁴ Karlsson, L.⁵

2
- 1542530965
- J.M. Lackner, W. Waldhauser, R. Berghauser, R. Ebner, B. Major, and T. Schoberl Thin Solid Films 453-454 2004 195
- (2004) Thin Solid Films , vol.453-454 , pp. 195
- Lackner, J.M.¹ Waldhauser, W.² Berghauser, R.³ Ebner, R.⁴ Major, B.⁵ Schoberl, T.⁶

3
- 33846205942
- R. Rodriguez-Baracaldo, J.A. Benito, E.S. Puchi-Cabrera, and M.H. Staia Wear 262 2007 380
- (2007) Wear , vol.262 , pp. 380
- Rodriguez-Baracaldo, R.¹ Benito, J.A.² Puchi-Cabrera, E.S.³ Staia, M.H.⁴

4
- 0031347180
- S. Veprek Surf. Coat. Technol. 97 1997 15
- (1997) Surf. Coat. Technol. , vol.97 , pp. 15
- Veprek, S.¹

5
- 36449001310
- S. Veprek, S. Reiprich, and L. Shizi Appl. Phys. Lett. 66 20 1995 2640
- (1995) Appl. Phys. Lett. , vol.66 , Issue.20 , pp. 2640
- Veprek, S.¹ Reiprich, S.² Shizi, L.³

6
- 0035465603
- F. Vaz, L. Rebouta, Ph. Goudeau, T. Girardeau, J. Pacaud, J.P. Riviere, and A. Traverse Surf. Coat. Technol. 146-147 2001 274
- (2001) Surf. Coat. Technol. , vol.146-147 , pp. 274
- Vaz, F.¹ Rebouta, L.² Goudeau, P.³ Girardeau, T.⁴ Pacaud, J.⁵ Riviere, J.P.⁶ Traverse, A.⁷

7
- 0037472783
- P.J. Martin, and A. Bendavid Surf. Coat. Technol. 173-164 2003 245
- (2003) Surf. Coat. Technol. , vol.173 , Issue.164 , pp. 245
- Martin, P.J.¹ Bendavid, A.²

8
- 77956886033
- K.H. Kim, S. Choi, and S. Yoon Surf. Coat. Technol. 298 2002 24
- (2002) Surf. Coat. Technol. , vol.298 , pp. 24
- Kim, K.H.¹ Choi, S.² Yoon, S.³

9
- 0036289654
- S. Veprek, and M. Jilek Pure Appl. Chem. 74 2002 475
- (2002) Pure Appl. Chem. , vol.74 , pp. 475
- Veprek, S.¹ Jilek, M.²

10
- 2142806777
- S. Veprek, P. Nesladek, A. Niederhofer, F. Glatz, M. Jilek, and M. Sima Surf. Coat. Technol. 108-109 1998 138
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 138
- Veprek, S.¹ Nesladek, P.² Niederhofer, A.³ Glatz, F.⁴ Jilek, M.⁵ Sima, M.⁶

11
- 10744231720
- S. Carvalho, L. Rebouta, E. Ribeiro, F. Vaz, M.F. Denannot, J. Pacard, J.P. Riviere, F. Paunier, R.J. Gaboriaud, and E. Alves Surf. Coat. Technol. 177-178 2004 369
- (2004) Surf. Coat. Technol. , vol.177-178 , pp. 369
- Carvalho, S.¹ Rebouta, L.² Ribeiro, E.³ Vaz, F.⁴ Denannot, M.F.⁵ Pacard, J.⁶ Riviere, J.P.⁷ Paunier, F.⁸ Gaboriaud, R.J.⁹ Alves, E.¹⁰

12
- 1342268803
- M. Parlinska-Wojtan, A. Karimi, T. Cselle, and M. Morstein Surf. Coat. Technol. 177-178 2004 376
- (2004) Surf. Coat. Technol. , vol.177-178 , pp. 376
- Parlinska-Wojtan, M.¹ Karimi, A.² Cselle, T.³ Morstein, M.⁴

13
- 28944435085
- S.K. Kim, P.V. Vinh, J.H. Kim, and T. Ngoc Surf. Coat. Technol. 200 2005 1391
- (2005) Surf. Coat. Technol. , vol.200 , pp. 1391
- Kim, S.K.¹ Vinh, P.V.² Kim, J.H.³ Ngoc, T.⁴

14
- 1342344859
- I. Park, S.R. Choi, J.H. Suh, C. Park, and K.H. Kim Thin Solid Films 447-448 2004 443
- (2004) Thin Solid Films , vol.447-448 , pp. 443
- Park, I.¹ Choi, S.R.² Suh, J.H.³ Park, C.⁴ Kim, K.H.⁵

15
- 46849117093
- S. Veprek Coat. Technol. 202 2008 5063
- (2008) Coat. Technol. , vol.202 , pp. 5063
- Veprek, S.¹

16
- 33751222569
- A. Karimi, G. Allidi, and R. Sanjines Surf. Coat. Technol. 201 2006 4062
- (2006) Surf. Coat. Technol. , vol.201 , pp. 4062
- Karimi, A.¹ Allidi, G.² Sanjines, R.³

17
- 0033076264
- B.M. Clements, H. Hung, and S.A. Barnett MRS Bull. 24 1999 20
- (1999) MRS Bull. , vol.24 , pp. 20
- Clements, B.M.¹ Hung, H.² Barnett, S.A.³

18
- 58549088294
- N. Fukumoto, H. Ezura, K. Yamamoto, A. Hotta, and T. Suzuki Surf. Coat. Technol. 2003 2009 1343
- (2009) Surf. Coat. Technol. , vol.2003 , pp. 1343
- Fukumoto, N.¹ Ezura, H.² Yamamoto, K.³ Hotta, A.⁴ Suzuki, T.⁵

19
- 0029141722
- H. Oettel, and R. Wiedemann Surf. Coat. Technol. 76-77 1995 265
- (1995) Surf. Coat. Technol. , vol.76-77 , pp. 265
- Oettel, H.¹ Wiedemann, R.²

20
- 4243222198
- D.B. Lewis, I. Wadsworth, and V. Valvoda Surf. Coat. Technol. 116-119 1999 285
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 285
- Lewis, D.B.¹ Wadsworth, I.² Valvoda, V.³

21
- 0037737706
- X. Zhang, X. Wu, Z. Yi, T. Zhang, and H. Zhang Nuclear. Instr. Methods Phys. Res. B 206 2003 382
- (2003) Nuclear. Instr. Methods Phys. Res. B , vol.206 , pp. 382
- Zhang, X.¹ Wu, X.² Yi, Z.³ Zhang, T.⁴ Zhang, H.⁵

22
- 0037331265
- H.B. Barshilia, and K.S. Rajam Bull. Mater. Sci. 26 2 2003 233
- (2003) Bull. Mater. Sci. , vol.26 , Issue.2 , pp. 233
- Barshilia, H.B.¹ Rajam, K.S.²

23
- 0345065237
- W.D. Sproul Science 273 1996 889
- (1996) Science , vol.273 , pp. 889
- Sproul, W.D.¹

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