Effects of bilayer thickness and post-deposition annealing on the mechanical and structural properties of (Ti,Cr,Al)N/(Al,Si)N multilayer coatings

Surface and Coatings Technology

Volumn 203, Issue 10-11, 2009, Pages 1343-1348

  Fukumoto, N ^a   Ezura, H ^a   Yamamoto, K ^b   Hotta, A ^a   Suzuki, T ^a  

^a KEIO UNIVERSITY   (Japan)

^b KOBE STEEL LTD   (Japan)

Author keywords

Arc ion plating; Multilayer

Indexed keywords

ALUMINUM; ANNEALING; CAVITY RESONATORS; CHROMIUM; COATINGS; CRYSTAL STRUCTURE; ELECTRODEPOSITION; FOURIER TRANSFORMS; HARDNESS; MULTILAYERS; PHASE INTERFACES; PHASE STABILITY; SILICON; THERMODYNAMIC STABILITY; TRANSMISSION ELECTRON MICROSCOPY; VACUUM; VACUUM DEPOSITED COATINGS; VACUUM FURNACES;

ARC ION-PLATING; BILAYER THICKNESS; HIGH TEMPERATURE (HT); HIGH THERMAL STABILITY; MULTI LAYER COATINGS; MULTI LAYER STRUCTURES; MULTILAYER; SHARP INTERFACES; THERMAL STABILITY; VACUUM ANNEALING; X RAY DIFFRACTION (XRD);

CHROMATE COATINGS;

EID: 58549088294     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.11.002     Document Type: Article

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