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Thin Solid Films

Volumn 518, Issue 24, 2010, Pages 7312-7315

Effect of grain size on mechanical properties in CrAlN/SiNx multilayer coatings

(3) Lin, Chih Hsiung a Tsai, Yan Zuo a Duh, Jenq Gong a

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

Amorphous; CrAlN; Hall Petch equation; Multilayer; SiNx

Indexed keywords

AMORPHOUS; BI-LAYER; CRALN; GRAIN SIZE; HALL-PETCH EQUATION; HRTEM IMAGES; MULTI-LAYER-COATING; RF-MAGNETRON SPUTTERING; SINX; XRD;

COATINGS; GRAIN SIZE AND SHAPE; HARDNESS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MULTILAYERS; NANOINDENTATION;

SILICON NITRIDE;

EID: 77956875141 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.04.100 Document Type: Conference Paper

Times cited : (29)

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