Developing a dual-stage indirect virtual metrology architecture

Proceedings - IEEE International Conference on Robotics and Automation

Volumn , Issue , 2010, Pages 2107-2112

  Tsai, Wen Huang ^a   Cheng, Fan Tien ^a   Wu, Wei Ming ^a   Lin, Tung Ho ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Dual stage indirect VM architecture (DIVMA); Indirect VM problem; Virtual cassette; Virtual metrology (VM)

Indexed keywords

COUPLING EFFECT; DUAL STAGE; DUAL-STAGE INDIRECT VM ARCHITECTURE (DIVMA); INDIRECT VM PROBLEM; MANUFACTURING PROCESS; PROCESS TOOLS; PROCESSING QUALITY; SINGLE STAGE; TFT-LCDS; VIRTUAL CASSETTE; VIRTUAL METROLOGY;

ARCHITECTURE; CHEMICAL VAPOR DEPOSITION; MEASUREMENTS; ROBOTICS;

VIRTUAL CORPORATION;

EID: 77955834441     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2010.5509719     Document Type: Conference Paper

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