NN-based key-variable selection method for enhancing virtual metrology accuracy

IEEE Transactions on Semiconductor Manufacturing

Volumn 22, Issue 1, 2009, Pages 204-211

  Lin, Tung Ho ^a   Cheng, Fan Tien ^b   Wu, Wei Ming ^b   Kao, Chi An ^b   Ye, Aeo Juo ^b   Chang, Fu Chien ^b  

^a CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Multi regression based stepwise selection (MR based SS); Neural network based stepwise selection (NN based SS); Virtual metrology (VM)

Indexed keywords

MEASUREMENTS; RECURRENT NEURAL NETWORKS; REGRESSION ANALYSIS;

BACK-PROPAGATION NEURAL NETWORKS; BACKWARD ELIMINATIONS; BEST MODELS; CONJECTURE MODELS; ETCHING PROCESS; FORWARD SELECTIONS; GENERALIZED REGRESSION NEURAL NETWORKS; ILLUSTRATIVE EXAMPLES; KEY VARIABLES; MULTI-REGRESSION-BASED STEPWISE SELECTION (MR-BASED SS); NEURAL-NETWORK-BASED STEPWISE SELECTION (NN-BASED SS); PROCESS TIME; SEMICONDUCTOR MANUFACTURING; SIMPLE RECURRENT NEURAL NETWORKS; TEST RESULTS; VARIABLE SELECTION METHODS; VARIABLE SELECTION PROBLEMS; VIRTUAL METROLOGY (VM);

NEURAL NETWORKS;

EID: 59849112812     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2008.2011185     Document Type: Conference Paper

References (20)

1. Y.-C. Chang and F.-T. Cheng, "Application development of virtual metrology in semiconductor industry," in Proc. 31st Annu. Conf. IEEE Industrial Electronics, Raleigh, NC, Nov. 2005, pp. 124-129.
2. F.-T. Cheng, H.-C. Huang, and C.-A. Kao, "Dual-phase virtual metrology scheme," IEEE Trans. Semicond. Manuf., vol. 20, no. 4, pp. 566-571, Nov. 2007.
3. A. Weber, "Virtual metrology and your technology watch list: Ten things you should know about this emerging technology," Future Fab Int., no. 22, pp. 52-54, Jan. 2007, sec. 4.
4. J. Moyne, E. del Castillo, and A. M. Hurwitz, Run-to-Run Control in Semiconductor Manufacturing. Boca Raton, FL: CRC, 2001.
5. A. A. Khan, J. R. Moyne, and D. M. Tilbury, "An approach for factory-wide control utilizing virtual metrology," IEEE Trans. Semicond. Manuf., vol. 20, no. 4, pp. 364-375, Nov. 2007.
6. Y.-C. Su, T.-H. Lin, F.-T. Cheng, and W.-M. Wu, "Accuracy and realtime considerations for implementing various virtual metrology algorithms," IEEE Trans. Semicond. Manuf., vol. 21, no. 3, Aug. 2008.
7. Y.-T. Huang, F.-T. Cheng, and Y.-T. Chen, "Importance of data quality in virtual metrology," in Proc. 32th Annu. Conf. IEEE Industrial Electronics Soc., Paris, France, Nov. 2006, pp. 3727-3732.
8. L. Xu and W. Zhang, "Comparison of different methods for variable selection," Analytica Chimica Acta, vol. 446, pp. 477-483, 2001.
9. T. Matsuura, "An application of neural network for selecting feature variables in machinery diagnosis," J. Mater. Processing Technol., vol. 157-158, pp. 203-207, 2004.
10. E. W. Steyerberg, J. C. Eijkemans, J. Dik, and F. Habbema, "Stepwise selection in small data sets: A simulation study of bias in logistic regression analysis," J. Clin. Epidemiol., vol. 52, no. 10, pp. 935-942, 1999.
11. Y.-C. Su, M.-H. Hung, F.-T. Cheng, and Y.-T. Chen, "A processing quality prognostics scheme for plasma sputtering in TFT-LCD manufacturing," IEEE Trans. Semicond. Manuf., vol. 19, no. 2, pp. 183-194, May 2006.
12. M.-H. Hung, T.-H. Lin, F.-T. Cheng, and R.-C. Lin, "A novel virtual metrology scheme for predicting CVD thickness in semiconductor manufacturing," IEEE/ASME Trans. Mechatron., vol. 12, no. 3, pp. 308-316, Jun. 2007.
13. Z. K. Timothy, Multiple Regression and Beyond. Austin, TX: Allyn & Bacon, 2005.
14. D. R. Anderson, D. J. Sweeney, T. A. Williams, and J.-C. Chen, Statistics for Business and Economics-A Practical Approach. Singapore: Thomson, 2006.
15. G. R. Pasha, "Selection of variables in multiple regression using stepwise regression," J. Res. (Sci.), vol. 13, no. 2, pp. 119-127, Dec. 2002.
16. D. G. Montgomery, E. A. Peck, and G. G. Vining, Introduction to Linear Regression Analysis, 3rd ed. New York: Wiley, 2001.
17. D. C. Montgomery, Design and Analysis of Experiments, 6th ed. New York: Wiley, 2005.
18. G. Castellano and A. M. Fanelli, "Variables selection using neural-network models," Neurocomputing, vol. 31, pp. 1-13, 2000.
19. A. Jain and D. Zongker, "Feature selection: Evaluation, application, and small sample performance," IEEE Trans. Pattern Anal. Machine Intelligence, vol. 19, no. 2, pp. 153-158, Feb. 1997.
20. W.-S. Wei, Time Series Analysis-Univariate and Multivariate Methods, 2nd ed. Reading, MA: Addison-Wesley, 2006.