Intelligent prognostics system design and implementation

IEEE Transactions on Semiconductor Manufacturing

Volumn 19, Issue 2, 2006, Pages 195-206

  Su, Yu Chuan ^a,b   Cheng, Fan Tien ^a,b,d   Hung, Min Hsiung ^a,c   Huang, Hsien Cheng ^a,b  

^a IEEE   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c NATIONAL DEFENSE UNIVERSITY   (Taiwan)

^d National Cheng Kung University ^*  (Taiwan)

Author keywords

Equipment engineering system (EES); Generic embedded device (GED); Predictive maintenance; Virtual metrology

Indexed keywords

EQUIPMENT ENGINEERING SYSTEM (EES); GENERIC EMBEDDED DEVICE (GED); PREDICTIVE MAINTENANCE; VIRTUAL METROLOGY;

CONVEYORS; EMBEDDED SYSTEMS; LIQUID CRYSTAL DISPLAYS; RELIABILITY; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILM TRANSISTORS;

INTELLIGENT AGENTS;

EID: 33646730899     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2006.873512     Document Type: Article

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