Evaluating reliance level of a virtual metrology system

IEEE Transactions on Semiconductor Manufacturing

Volumn 21, Issue 1, 2008, Pages 92-102

  Cheng, Fan Tien ^a,b   Chen, Yeh Tung ^a,b   Su, Yu Chuan ^a,c   Zeng, Deng Lin ^b  

^a IEEE

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c FAR EAST UNIVERSITY   (Taiwan)

Author keywords

Degree of similarity; Global similarity index (GSI); Individual similarity index (ISI); Manufacturability; Reliance index (RI); Reliance level; Virtual metrology system (VMS)

Indexed keywords

COMPUTATION THEORY; DATA REDUCTION; MEASUREMENT THEORY; RELIABILITY THEORY;

GLOBAL SIMILARITY INDEX (GSI); INDIVIDUAL SIMILARITY INDEX (ISI); RELIANCE INDEX (RI); VIRTUAL METROLOGY SYSTEM (VMS);

VIRTUAL REALITY;

EID: 38949117544     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2007.914373     Document Type: Conference Paper

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