Millions of cantilevers for atomic force microscopy

Review of Scientific Instruments

Volumn 73, Issue 3 I, 2002, Pages 1188-

  Kawakatsu, Hideki ^a   Saya, Daisuke ^a   Kato, Atsushi ^a   Fukushima, Kimitake ^a   Toshiyoshi, Hiroshi ^a   Fujita, Hiroyuki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

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EID: 0036494337     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1448137     Document Type: Article

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