Multichannel Mueller matrix ellipsometry for simultaneous real-time measurement of bulk isotropic and surface anisotropic complex dielectric functions of semiconductors

Physical Review Letters

Volumn 90, Issue 21, 2003, Pages 2174021-2174024

  Chen, Chi ^a   An, Ilsin ^a   Collins, R W ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; COMPOSITION; ELLIPSOMETRY; SILICON;

MULTICHANNEL MUELLER MATRIX ELLIPSOMETRY;

SEMICONDUCTOR MATERIALS;

EID: 2142817988     PISSN: 00319007     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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