Synthesis of α-Al2 O3 thin films using reactive high-power impulse magnetron sputtering

EPL

Volumn 82, Issue 3, 2008, Pages

  Wallin, E ^a   Selinder, T I ^b   Elfwing, M ^b   Helmersson, U ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b Sandvik Tooling   (Sweden)

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EID: 79051470007     PISSN: 02955075     EISSN: 12864854     Source Type: Journal    
DOI: 10.1209/0295-5075/82/36002     Document Type: Article

References (26)