Fiber assembly of MEMS optical switches with U-groove channels

IEEE Transactions on Automation Science and Engineering

Volumn 5, Issue 2, 2008, Pages 207-215

  Chen, Wen Jie ^b   Lin, Wei ^a,b  

^a IEEE

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Fiber assembly; Flexure based mechanisms; Insertion; Microelectromechanical systems (MEMS) packaging; Micromanipulation

Indexed keywords

ERROR ANALYSIS; MEMS; OPTICAL SWITCHES; PROBLEM SOLVING; SILICON;

FIBER ASSEMBLY; FLEXURE-BASED MECHANISMS; MICROELECTROMECHANICAL SYSTEMS (MEMS) PACKAGING; MICROMANIPULATION;

ELECTRONICS PACKAGING;

EID: 41949110959     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2007.895006     Document Type: Article

References (23)

1. S. J. Ralis, B. Vikramaditya, and B. J. Nelson, "Micropositioning of a weakly calibrated microassembly system using coarse-to-fine visual servoing strategies," IEEE Trans. Electron. Packag. Manufact., vol. 23, no. 2, Apr. 2000.
2. J. A. Thompson and R. S. Fearing, "Automating microassembly with ortho-tweezers and force sensing," in Proc. 2001 IEEE/RSJ Int. Conf. Intell. Robots Syst., Maui. HI, USA. Oct. 2001.
3. H. S. Cho, H. J. Wamecke, and D. G. Gweon, "Robotic assembly: A synthesizing overview," Robotica, vol. 5, pp. 153-165, 1987.
4. Y. Yamamoto and T. Hashimoto et al., "Measurement of force sensory information in ultra-precision assembly tasks," IEEE Trans. Mechatron., vol. 7, no. 2, pp. 186-189, 2002.
5. S. R. Chhatpar and M. S. Branicky, "A hybrid system approach to force-Guided Robotic Assemblies," in Proc. IEEE Int. Symp. Assembly and Task Planning, Porto, Portugal, Jul. 1999, pp. 301-306.
6. D. E. Whitney, "Quasi-static assembly of compliantly supported rigid parts," Trans. ASME J. Dynamic Syst., Measure., Control, vol. 104, pp. 65-77, Mar. 1982.
7. M. A. Peshkin, "Programmed compliance for error corrective assembly," IEEE Trans. Robot. Autom., vol. 6, no. 4, pp. 473-482, Aug. 1990.
8. W. K. Kim, B. J. Yi, and W. Cho, "RCC characteristics of planar/sperical three degree-of freedom parallel mechanism with joint compliances," Trans. ASME J. Mech. Design, vol. 122, pp. 10-16, Mar. 2000.
9. M. Griffis and J. Duffy, "Kinestatic control: A novel theory for simultaneously regulating force and displacement," Trans. ASME J. Mech. Design, vol. 113, pp. 508-515, Dec. 1991.
10. H. V. Brussel, J. Peirs, and D. Reynaerts et al., "Assembly of microsystems," Annals of CIRP, vol. 49, no. 2, pp. 451-472, 2000.
11. B. Vikramaditya, B. J. Nelson, Y. Ge, and E. T. Enikov. "Microassembly of hybrid magnetic MEMS," J. Micromechatron., vol. 1, no. 2, pp. 99-116, 2001.
12. R. M. Bostock, "Silicon nitride microclip for the kinematic location of optical fibers in silicon V-shaped grooves," J. Micromech. Microeng., no. 8, pp. 346-360, 1988.
13. C. Strandman et al., "Passive and fixed alignment of devices using flexible silicon elements formed by selective etching," J. Micromech. Microeng., no. 8, pp. 39-44, 1998.
14. M. W. Beranek and E. Y. Chan et al., "Passive alignment optical subassemblies for military/aerospec fiber-optical transmitter/receiver modules," IEEE Trans. Adv. Packag., vol. 23, no. 3, pp. 461-468, Aug. 2000.
15. W. A. Atia and S. D. Conover et al., "Manufacturing system using solder self-alignment with optical component deformation fine alignment," U.S. Patent No. 6,543,114B2, 2003.
16. K. Tsui, A. A. Geisberger, M. Ellis, and G. D. Skidmore, "Micromachined end-effector and techniques for directed MEMS assembly," J. Micromech, Microeng., vol. 14, pp. 542-549, 2004.
17. N. Dechev, W. L. Cleghorn, and J. K. Mills, "Microassembly of 3-D microstructures using a compliant passive microgripper," J. o Microelectromech. Syst., vol. 13, no. 2, pp. 176-189, April 2004.
18. Z. F. Wang, W. Cao, and X. C. Shan et al., "Development of a 1 × 4 MEMS-based optical switch," Sens. Actuators, vol. 114, pp. 80-87, 2004.
19. R. J. Castilone, Mechanical reliability: Applied stress design guideline 2001. Corning White Paper, WP5053.
20. L. L. Howell, Compliant Mechanisms. New York: Wiley, 2001.
21. C. Gosselin, "Stiffness mapping for parallel manipulators." IEEE Trans. Robot. Autom., vol. 6, no. 3, pp. 377-382, Jun. 1990.
22. H. Lipkin and T. Petterson, "Generalized center of compliance and stiffness," in Proc. IEEE Int. Conf. Robot. Autom., 1992, no. 2, pp. 1251-1256.
23. W. J. Chen, W. Lin, K. H. Low, and G. Yang, "A 3-DOF flexure-based fixture for optical MEMS switch assembly," in Proc. IEEE/ASME Int. Conf. Adv. Intell. Mechatron., Monterey, CA, 2005, pp. 618-623.