메뉴 건너뛰기




Volumn , Issue , 2008, Pages 959-966

On the precision alignment and hybrid assembly aspects in manufacturing of a microspectrometer

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT; AUTOMATION; FIBERS; FOURIER TRANSFORMS; HYBRID MATERIALS; MICHELSON INTERFEROMETERS; MICROOPTICS; OPTICAL FIBERS; ROBOTIC ASSEMBLY; SILICON; SILICON DETECTORS;

EID: 54949148815     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COASE.2008.4626541     Document Type: Conference Paper
Times cited : (20)

References (26)
  • 4
    • 18644386557 scopus 로고    scopus 로고
    • Fabricating Microholometer Array on Unplanar Readout Integrated Circuit
    • Pages, January
    • Wang H., Xinjian Y., Lai J., Li Y., "Fabricating Microholometer Array on Unplanar Readout Integrated Circuit", International Journal of Infrared and Millimeter Waves, Volume 26, Issue 5, Page(s):751-762, January 2005.
    • (2005) International Journal of Infrared and Millimeter Waves , vol.26 , Issue.5 , pp. 751-762
    • Wang, H.1    Xinjian, Y.2    Lai, J.3    Li, Y.4
  • 7
  • 9
    • 0001359336 scopus 로고    scopus 로고
    • Tactile microgripper for automated handling of microparts
    • Pages
    • Greitmann G., Buser R.A., "Tactile microgripper for automated handling of microparts", Sensors and Actuators, A.53, Page(s): 410-415, 1996.
    • (1996) Sensors and Actuators, A , vol.53 , pp. 410-415
    • Greitmann, G.1    Buser, R.A.2
  • 15
    • 1942436713 scopus 로고    scopus 로고
    • Microassembly of 3-D microstructures using a compliant, passive microgripper
    • Pages, April
    • Dechev N., Cleghorn W.L., Mills J.K, "Microassembly of 3-D microstructures using a compliant, passive microgripper", Journal of Microelectromechanical Systems, Volume 13, Issue 2, Page(s): 176 - 189, April 2004.
    • (2004) Journal of Microelectromechanical Systems , vol.13 , Issue.2 , pp. 176-189
    • Dechev, N.1    Cleghorn, W.L.2    Mills, J.K.3
  • 16
    • 54949113618 scopus 로고    scopus 로고
    • Ocean Optics, Ocean Optics Spectrometers, www.oceanoptics.com/products/ spectrometers.asp, 2008.
    • Ocean Optics, "Ocean Optics Spectrometers", www.oceanoptics.com/products/ spectrometers.asp, 2008.
  • 17
    • 1542754866 scopus 로고    scopus 로고
    • Miniaturized LIGA Fourier transformation spectrometer
    • Pages, 22-24 Oct
    • Solf, C., Mohr J., Wallrabe U., "Miniaturized LIGA Fourier transformation spectrometer", Proceedings of IEEE Sensors, Volume 2, Issue 1, Page(s): 773-776, 22-24 Oct 2003.
    • (2003) Proceedings of IEEE Sensors , vol.2 , Issue.1 , pp. 773-776
    • Solf, C.1    Mohr, J.2    Wallrabe, U.3
  • 19
    • 34247388925 scopus 로고    scopus 로고
    • Miniaturized FTIR-spectrometer based on optical MEMS translatory actuator
    • MOEMS and Miniaturized Systems VI
    • Sandner T., Kenda A., et al., "Miniaturized FTIR-spectrometer based on optical MEMS translatory actuator", Proceedings of SPIE Vol. 6466, MOEMS and Miniaturized Systems VI, 2007.
    • (2007) Proceedings of SPIE , vol.6466
    • Sandner, T.1    Kenda, A.2
  • 20
    • 0036902641 scopus 로고    scopus 로고
    • Tunable optical filter of porous silicon as key component for a MEMS spectrometer
    • Pages, Dec
    • Lammel G., Schweizer S., Schiesser S., Renaud P., "Tunable optical filter of porous silicon as key component for a MEMS spectrometer", Journal of Microelectromechanical Systems (JMEMS), Volume 11, Issue 6, Page(s): 815 - 828, Dec 2002.
    • (2002) Journal of Microelectromechanical Systems (JMEMS) , vol.11 , Issue.6 , pp. 815-828
    • Lammel, G.1    Schweizer, S.2    Schiesser, S.3    Renaud, P.4
  • 24
    • 36349029738 scopus 로고    scopus 로고
    • 3: Multiscale, Deterministic MicroNano Assembly System for Construction of On-Wafer Microrobots, IEEE International Conference on Robotics and Automation 2007, Issue 10-14, Page(s):461 - 466, Roma, Italy, April 2007.
    • 3: Multiscale, Deterministic MicroNano Assembly System for Construction of On-Wafer Microrobots", IEEE International Conference on Robotics and Automation 2007, Volume-Issue 10-14, Page(s):461 - 466, Roma, Italy, April 2007.
  • 26
    • 33646023710 scopus 로고    scopus 로고
    • Assembled Fourier Transform Micro-spectrometer, Micromachining and Micro fabrication Process Technology XI
    • Sin J., Lee W.H, Popa D.O., Stephanou H.E., "Assembled Fourier Transform Micro-spectrometer", Micromachining and Micro fabrication Process Technology XI, Proc. of SPIE Vol. 6109, 2006.
    • (2006) Proc. of SPIE , vol.6109
    • Sin, J.1    Lee, W.H.2    Popa, D.O.3    Stephanou, H.E.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.