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Applied Physics Letters

Volumn 96, Issue 26, 2010, Pages

Composition measurement of the Ni-silicide transient phase by atom probe tomography

(4) Hoummada, K a Blum, I a Mangelinck, D a Portavoce, A a

a AIX MARSEILLE UNIVERSITÉ (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; GRAIN BOUNDARIES; NANOCRYSTALS; NICKEL ALLOYS; NICKEL COMPOUNDS; PLATINUM ALLOYS; PROBES; SILICIDES; SILICON; X RAY DIFFRACTION;

ATOM PROBE TOMOGRAPHY; COMPOSITION MEASUREMENTS; DIFFRACTION PEAKS; IN-SITU X-RAY DIFFRACTION; NANOCRYSTALLINES; NI SILICIDE; SI SUBSTRATES; TRANSIENT PHASE;

AMORPHOUS SILICON;

EID: 77954333201 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3457995 Document Type: Article

Times cited : (38)

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