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Volumn 95, Issue 18, 2009, Pages

Kinetics of a transient silicide during the reaction of Ni thin film with (100)Si

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL SCANNING CALORIMETRY; SILICIDES; X RAY DIFFRACTION;

EID: 71049148070     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3257732     Document Type: Article
Times cited : (33)

References (16)
  • 1
    • 0029488445 scopus 로고
    • 0040-6090,. 10.1016/0040-6090(95)06936-4
    • R. Mukai, S. Ozawa, and H. Yagi, Thin Solid Films 0040-6090 270, 567 (1995). 10.1016/0040-6090(95)06936-4
    • (1995) Thin Solid Films , vol.270 , pp. 567
    • Mukai, R.1    Ozawa, S.2    Yagi, H.3
  • 3
    • 0022561250 scopus 로고
    • 0884-2914,. 10.1557/JMR.1986.0205
    • F. M. d'Heurle and P. Gas, J. Mater. Res. 0884-2914 1, 205 (1986). 10.1557/JMR.1986.0205
    • (1986) J. Mater. Res. , vol.1 , pp. 205
    • D'Heurle, F.M.1    Gas, P.2
  • 5
    • 0020115448 scopus 로고
    • GROWTH KINETICS OF PLANAR BINARY DIFFUSION COUPLES: ″THIN-FILM CASE″ VERSUS ″BULK CASES″ .
    • DOI 10.1063/1.331028
    • U. Gösele and K. N. Tu, J. Appl. Phys. 0021-8979 53, 3252 (1982). 10.1063/1.331028 (Pubitemid 12524962)
    • (1982) Journal of Applied Physics , vol.53 , Issue.4 , pp. 3252-3260
    • Goesele, U.1    Tu, K.N.2
  • 6
    • 71049170055 scopus 로고    scopus 로고
    • Ph. D. thesis, Universit́ Polytechnique de Montŕal.
    • C. Coia, Ph. D. thesis, Universit́ Polytechnique de Montŕal, 2008.
    • (2008)
    • Coia, C.1
  • 13
    • 13744257176 scopus 로고    scopus 로고
    • Differential scanning calorimetry analysis of the linear parabolic growth of nanometric Ni suicide thin films on a Si substrate
    • DOI 10.1063/1.1852727, 041903
    • F. Nemouchi, D. Mangelinck, C. Bergman, P. Gas, and U. Smith, Appl. Phys. Lett. 0003-6951 86, 041903 (2005). 10.1063/1.1852727 (Pubitemid 40238035)
    • (2005) Applied Physics Letters , vol.86 , Issue.4 , pp. 0419031-0419033
    • Nemouchi, F.1    Mangelinck, D.2    Bergman, C.3    Gas, P.4    Smith, U.5
  • 16
    • 71049142627 scopus 로고
    • Ph. D. thesis, Technische Universiteit Eindoven.
    • R. C. J. Schiepers, Ph. D. thesis, Technische Universiteit Eindoven, 1990.
    • (1990)
    • Schiepers, R.C.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.