Three-dimensional composition mapping of NiSi phase distribution and Pt diffusion via grain boundaries in Ni2Si

Scripta Materialia

Volumn 62, Issue 8, 2010, Pages 568-571

  Mangelinck, Dominique ^a   Hoummada, Khalid ^a   Portavoce, Alain ^a   Perrin, Carine ^a   Daineche, Rachid ^a   Descoins, Marion ^a   Larson, David J ^b   Clifton, Peter H ^b  

^a AIX MARSEILLE UNIVERSITY   (France)

^b Imago Scientific Instruments   (United States)

Author keywords

Atom probe; Diffusion; Grains boundary; Ni silicide; Platinum

Indexed keywords

DIFFUSION; GRAIN BOUNDARIES; NICKEL ALLOYS; NICKEL COMPOUNDS; PROBES; SILICIDES;

ATOM PROBE; ATOM PROBE TOMOGRAPHY; COLUMNAR GRAIN; CONTINUOUS LAYERS; INTERPHASE BOUNDARIES; NI SILICIDE; PHASE DISTRIBUTION; SIMULTANEOUS GROWTH;

PLATINUM;

EID: 76549125396     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2009.12.044     Document Type: Article

References (22)

1. Mukai R., Ozawa S., and Yagi H. Thin Solid Films 270 (1995) 567
2. Mangelinck D., Dai J.Y., Pan J., and Lahiri S.K. Appl. Phys. Lett. 75 (1999) 1736
3. Mangelinck D., Dai J.Y., Lahiri S.K., Ho C.S., and Osipowicz T. Mat. Res. Soc. Symp. Proc. 564 (1999) 163
4. Lee P.S., Pey K.L., Mangelinck D., Ding J., Wee A.S.T., and Chan L. IEEE Electron Device Lett. 22 (2001) 568
5. Lavoie C., Detavernier C., Cabral Jr. C., d'Heurle F.M., Kellock A.J., Jordan-Sweet J., and Harper J.M.E. Microelectron. Eng. 83 (2006) 2042
6. Deduytsche D., Detavernier C., Van Meirhaeghe R.L., Jordan-Sweet J.L., and Lavoie C. J. Appl. Phys. 101 (2007) 044508
7. Chu W.K., Lau S.S., Mayer J.W., Müller H., and Nicolet M.-A. Thin Solid Films 25 (1975) 393
8. d'Heurle F.M., and Gas P. J. Mater. Res. 1 (1986) 205
9. Chu W.K., Kraütle H., Mayer J.W., Müller H., and Nicolet M.-A. Appl. Phys. Lett. 25 (1974)
10. Lavoie C., d'Heurle F.M., Detavernier C., and Cabral C. Microelectron. Eng. 70 (2003) 144
11. Cojocaru-Mirédin O., Mangelinck D., Hoummada K., Cadel E., Blavette D., Deconihout B., and Perrin-Pellegrino C. Scripta Mater. 57 (2007) 373
12. Hoummada K., Perrin-Pellegrino C., and Mangelinck D. J. Appl. Phys. 106 (2009) 113525
13. Rivero C., Gergaud P., Gailhanou M., Thomas O., Froment B., Jaouen H., and Carron V. Appl. Phys. Lett. 87 (2005) 041904
14. Mangelinck D., and Hoummada K. Appl. Phys. Lett. 92 (2008) 254101
15. Miller M.K. Atom Probe Tomography: Analysis at the Atomic Level (2000), Kluwer Academic/Plenum Publishers, New York
16. Thompson K., Lawrence D., Larson D.J., Olson J.D., Kelly T.F., and Gorman B. Ultramicroscopy 107 (2007) 131
17. Larson D.J., et al. Ultramicroscopy 79 (1999) 287
18. Kelly T.F., and Miller M.K. Rev. Sci. Instrum. 78 (2007) 031101
19. Coffey K.R., Clevenger L.A., Barmak K., Rudman D.A., and Thompson C.V. Appl. Phys. Lett. 55 (1989) 852
20. Hoummada K., Portavoce A., Perrin-Pellegrino C., Mangelinck D., and Bergman C. Appl. Phys. Lett. 92 (2008) art. 133109
21. Corni F., Grignaffini Gregorio B., Ottaviani G., Queirolo G., and Follegot J.P. Appl. Surf. Sci. 73 (1993) 197
22. Demeulemeester J., Smeets D., Van Bockstael C., Detavernier C., Comrie C.M., Barradas N.P., Vieira A., and Vantomme A. Appl. Phys. Lett. 93 (2008) art. 261912