Effect of target frequency, bias voltage and bias frequency on microstructure and mechanical properties of pulsed DC CFUBM sputtered TiN coating

Surface and Coatings Technology

Volumn 204, Issue 21-22, 2010, Pages 3684-3697

  Bhaduri, Debajyoti ^a   Ghosh, Arnab ^a   Gangopadhyay, Soumya ^a   Paul, Soumitra ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY   (India)

Author keywords

Bias frequency; Bias voltage; CFUBMS; Pulsed DC; Target frequency; TiN

Indexed keywords

BIAS FREQUENCY; CFUBMS; CLOSED-FIELD UNBALANCED MAGNETRON SPUTTERING; COATING MICROSTRUCTURES; COATING QUALITY; COMPOSITE MICROHARDNESS; DEPTH PROFILE; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; GRAZING-INCIDENCE X-RAY DIFFRACTION; HARDNESS TEST; HIGH-SPEED STEELS; INTER-DIFFUSION; ION CURRENTS; ION ETCHING; MICROSTRUCTURE AND MECHANICAL PROPERTIES; NEGATIVE BIAS; PROCESS PARAMETERS; PROCESS STABILITY; PULSED DC; PULSED MAGNETRON SPUTTERING; SCRATCH ADHESION TESTS; TARGET FREQUENCIES; TIN COATING; VICKERS MICROHARDNESS TESTS;

ADHESION; BIAS VOLTAGE; DC POWER TRANSMISSION; DIFFUSION COATINGS; HARDNESS TESTING; IONS; MECHANICAL PROPERTIES; MICROHARDNESS; MICROSTRUCTURE; PLASMA DENSITY; PLASMA STABILITY; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; TARGETS; TITANIUM NITRIDE; X RAY DIFFRACTION;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 77953692023     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.04.047     Document Type: Article

References (36)

1. Arnell R.D., Kelly P.J. Surf. Coat. Technol. 1999, 112(1-3):170.
2. McLeod P.S., Hartsough L.D. J. Vac. Sci. Technol. 1977, 14(1):263.
3. Waits R.K. J. Vac. Sci. Technol. 1978, 15(2):179.
4. Kelly P.J., Arnell R.D. Vacuum 2000, 56(3):159.
5. Window B., Savvides N. J. Vac. Sci. Technol. A 1986, 4(2):196.
6. Window B., Savvides N. J. Vac. Sci. Technol. A 1986, 4(2):453.
7. Savvides N., Window B. J. Vac. Sci. Technol. A 1986, 4(2):504.
8. Monaghan D.P., Teer D.G., Laing K.C., Efeoglu I., Arnell R.D. Surf. Coat. Technol. 1993, 59(1-3):21.
9. Schiller S., Goedicke K., Reschke J., Kirchhoff V., Schneider S., Milde F. Surf. Coat. Technol. 1993, 61(1-3):331.
10. Sellers J. Surf. Coat. Technol. 1998, 98(1-3):1245.
11. Kelly P.J., Beevers C.F., Henderson P.S., Arnell R.D., Bradley J.W., Bäcker H. Surf. Coat. Technol. 2003, 174-175:795.
12. Arnell R.D., Kelly P.J., Bradley J.W. Surf. Coat. Technol. 2004, 188-189:158.
13. Lee Jyh-Wei, Tien Shih-Kang, Kuo Yu-Chu Thin Solid Films 2006, 494(1-2):161. 161-167.
14. Kelly P.J., vom Braucke T., Liu Z., Arnell R.D., Doyle E.D. Surf. Coat. Technol. 2007, 202:774.
15. Rohde S.L., Sproul W.D. J. Vac. Sci. Technol. A 1991, 9(3):1178.
16. Rohde S.L., Hultman L., Wong M.S., Sproul W.D. Surf. Coat. Technol. 1992, 50:255.
17. Kadlec S., Musil J., Munz W.D., Hakanson G., Sundgren J.E. Surf. Coat. Technol. 1989, 39-40:487.
18. Kadlec S., Musil J., Valvoda V., Munz W.D., Petersein H., Schroeder J. Vacuum 1990, 41(7-9):2233.
19. Jiang N., Zhang H.J., Bao S.N., Shen Y.G., Zhou Z.F. Physica B 2004, 352:118.
20. Benegra M., Lamas D.G., Fernandez de Rapp M.E., Mingolo N., Kunrath A.O., Souza R.M. Thin Solid Films 2006, 494:146.
21. Guruvenkat S., Mohan Rao G. J. Vac. Sci. Technol. A 2002, 20(3):678.
22. Beilawski M., Seo D. Surf. Coat. Technol. 2005, 200:1476.
23. Olbrich W., Fessmann J., Kampschulte G., Ebberink J. Surf. Coat. Technol. 1991, 49(1-3):258.
24. Fessmann J., Olbrich W., Kampschulte G., Ebberink J. Mater. Sci. Eng. A 1991, 140:830.
25. Griepentrog M., Mackrodt B., Mark G., Linz T. Surf. Coat. Technol. 1995, 74-75:326.
26. Lugscheider E., Knotek O., Löffler F., Barimani C., Guerreiro S., Zimmermann H. Surf. Coat. Technol. 1995, 76-77:700.
27. Cooke K.E., Hamsphire J., Southall W., Teer D.G. Surf. Coat. Technol. 2004, 177-178:789.
28. Lee Jyh-Wei, Kuo Yu-Chu, Wang Chaur-Jeng, Chang Li-Chun, Liu Kuan-Ting Surf. Coat. Technol. 2008, 203(5-7):721.
29. Gangopadhyay S., Acharya R., Chattopadhyay A.K., Paul S. Surf. Coat. Technol. 2009, 203(20-21):3297.
30. Kelly P.J., Hall R., O'Brien J., Bradley J.W., Roche G., Arnell R.D. Surf. Coat. Technol. 2001, 142-144:635.
31. Gangopadhyay S., Acharya R., Chattopadhyay A.K., Paul S. Surf. Coat. Technol. 2009, 203(12):1565.
32. J.W. Lee, J.J. Cuomo, J. Vac. Sci. Technol. A 22 (2) 260.
33. Carvalho N.J.M., Zoestbergen E., Kooi B.J., De Hosson J.Th.M. Thin Solid Films 2003, 429:179.
34. Kelly P.J., Arnell R.D. J. Vac. Sci. Technol. A 1999, 17(3):945.
35. Chunyan Y., Linhai T., Yinghui W., Shebin W., Tianbao L., Bingshe X. Appl. Surf. Sci. 2009, 255:4033.
36. Nam K.H., Jung M.J., Han J.G. Surf. Coat. Technol. 2000, 131:222.