Synthesis of carbon-rich hafnia thin films by pulsed laser deposition

Journal of the European Ceramic Society

Volumn 30, Issue 11, 2010, Pages 2289-2300

  Pejaković, Dušan A ^a   Marschall, Jochen ^a   George, Mekha R ^b   Rogers, Bridget R ^b   Nieveen, Wesley R ^c   Pajcini, Vasil ^c  

^a SRI INTERNATIONAL   (United States)

^b VANDERBILT UNIVERSITY   (United States)

^c CHARLES EVANS AND ASSOCIATES   (United States)

Author keywords

Carbon; Films; HfO2; Refractories; Transition metal oxides

Indexed keywords

BACKGROUND GAS; CARBON RICH; CHEMICAL BONDINGS; DIRECT SYNTHESIS; HAFNIUM CARBIDE; LOW POROSITY; LOW PRESSURES; MICROCRYSTALLINITY; MOLAR FRACTIONS; OXIDE SCALE; STABLE FILMS; TRANSITION-METAL OXIDES;

AMORPHOUS FILMS; CARBIDES; CHEMICAL BONDS; DEPOSITION; HAFNIUM; HAFNIUM OXIDES; MICROSTRUCTURE; OXYGEN; PULSED LASER DEPOSITION; PULSED LASERS; REFRACTORY MATERIALS; SCALE (DEPOSITS); STAINLESS STEEL; TRANSITION METAL COMPOUNDS;

CARBON FILMS;

EID: 77953546152     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2010.01.009     Document Type: Article

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