Hybrid plasma bonding of germanium and glass wafers at low temperature

Materials Letters

Volumn 64, Issue 13, 2010, Pages 1532-1535

  Howlader, M M R ^a   Kibria, M G ^a   Zhang, F ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

Anodic bonding; Bonding strength; Hybrid plasma bonding; Hydrophilicity; Migration of cations and anions; Plasma activation and surface roughness

Indexed keywords

ANODIC BONDING; BONDING STRENGTH; HYBRID PLASMA; HYBRID PLASMA BONDING; MIGRATION OF CATIONS AND ANIONS; PLASMA ACTIVATION;

DIFFUSION BONDING; GERMANIUM; GLASS; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; HYDROPHILICITY; METAL ANALYSIS; PLASMAS; POSITIVE IONS; SURFACE PROPERTIES; SURFACE ROUGHNESS; WAFER BONDING;

GLASS BONDING;

EID: 77953127568     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2010.04.012     Document Type: Article

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