Structure, optical properties and thermal stability of pulsed sputter deposited high temperature HfOx/Mo/HfO2 solar selective absorbers

Solar Energy Materials and Solar Cells

Volumn 94, Issue 8, 2010, Pages 1412-1420

  Selvakumar, N ^a   Barshilia, Harish C ^b   Rajam, K S ^a   Biswas, A ^b  

^a SURFACE ENGINEERING DIVISION   (India)

^b BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

Hafnium oxide; Micro Raman spectroscopy; Multilayer absorbers; Optical properties; Spectroscopic ellipsometry; Thermal stability

Indexed keywords

ABSORBER LAYERS; AFTER-HEAT; AR PLASMAS; BAND GAPS; BONDING STRUCTURE; COMPOSITIONAL STABILITY; CU SUBSTRATE; ELLIPSOMETRIC DATA; HIGH TEMPERATURE; IN-VACUUM; MAGNETRON SPUTTERING SYSTEMS; MICRO RAMAN SPECTROSCOPY; MONOCLINIC PHASIS; MULTI-LAYER ABSORBERS; PULSED DIRECT CURRENT; SOLAR ABSORPTANCE; SOLAR SELECTIVE COATING; THERMAL EMITTANCE; THERMAL STABILITY; THERMALLY STABLE; TWO LAYERS; X-RAY DIFFRACTION DATA;

ANTIREFLECTION COATINGS; HAFNIUM; HAFNIUM OXIDES; MOLYBDENUM; MULTILAYERS; OPTICAL CONSTANTS; OPTICAL MULTILAYERS; OPTICAL PROPERTIES; OPTIMIZATION; OXIDES; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SPECTROSCOPIC ANALYSIS; SPECTROSCOPIC ELLIPSOMETRY; STAINLESS STEEL; SUBSTRATES; SYSTEM STABILITY; THERMODYNAMIC STABILITY; VACUUM; VACUUM DEPOSITED COATINGS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

SOLAR ABSORBERS;

EID: 77953127363     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2010.04.073     Document Type: Article

References (36)

1. B.O. Seraphin, Solar energy conversion: solid state physics aspects, in: Topics in Applied Physics, vol. 31, Springer, Berlin, 1979, pp. 24-35.
2. Ritala M., Leskela M., Niinisto L., Prohaska T., Friedbacher G., and Grasserbauer M. Development of crystallinity and morphology in hafnium dioxide thin films grown by atomic layer epitaxy. Thin Solid Films 250 (1994) 72-80
3. Al-Kuhaili M.F. Optical properties of hafnium oxide thin films and their application in energy-efficient windows. Opt. Mater. 27 (2004) 383-387
4. Lesser M. Antireflection coatings for silicon charge coupled devices. Opt. Eng. 26 (1987) 911-915
5. 2) thin films and their applications. Appl. Phys. A: Mater. Sci. Process 66 (1998) 335-343
6. 2 thin films. II - Vacuum ultraviolet all-dielectric narrowband filters. Appl. Opt. 29 (1990) 4284-4289
7. Edlou S.M., Smajkiewicz A., and Al-Jumaily G.A. Optical properties and environmental stability of oxide coatings deposited by reactive sputtering. Appl. Opt. 32 (1993) 5601-5605
8. 2 thin films. Surf. Coat. Technol. 201 (2006) 3530-3535
9. Park J.-W., Lee D.-K., Lim D., Lee H., and Choi S.-H. Optical properties of thermally annealed hafnium oxide and their correlation with structural change. J. Appl. Phys. 104 (2008) 033521-1-033521-5
10. 2: composition, morphology, and optical properties. J. Appl. Phys. 102 (2007) 044106-1-044106-8
11. Pervak V., Krausz F., and Apolonski A. Hafnium oxide thin films deposited by reactive middle-frequency dual-magnetron sputtering. Thin Solid Films 515 (2007) 7984-7989
12. Ushakov S.V., Navrotsky A., Yang Y., Stemmer S., Kukli K., Ritala M., Leskela M.A., Fejes P., Demkov A., Wang C., Nguyen B.-Y., Triyoso D., and Tobin P. Crystallization in hafnia and zirconia based systems. Phys. Status Solidi (B) 241 (2004) 2268-2278
13. Fang Q., Zhang J.-Y., Wang Z., Modreanu M., O'Sullivan B.J., Hurley P.K., Leedham T.L., Hywel D., Audier M.A., Jimenez C., Senateur J.-P., and Boyd I.W. Interface of ultrathin HfO2 films deposited by UV-photo-CVD. Thin Solid Films 453-454 (2004) 203-207
14. Barshilia H.C., and Rajam K.S. Reactive sputtering of hard nitride coatings using asymmetric-bipolar pulsed DC generator. Surf. Coat. Technol. 201 (2006) 329-337
15. Barshilia H.C., and Rajam K.S. Raman spectroscopy studies on the thermal stability of TiN, CrN, TiAlN coatings and nanolayered TiN/CrN, TiAlN/CrN multilayer coatings. J. Mater. Res. 19 (2004) 3196-3205
16. Chain E.E., Carver G.E., and Seraphin B.O. Highly reflecting molybdenum thin films having significant solar absorptance. Thin Solid Films 72 (1980) 59-64
17. Luo X., Demkov A.A., Triyoso D., Fejes P., Gregory R., and Zollner S. Combined experimental and theoretical study of thin hafnia films. Phys. Rev. B 78 (2008) 245314-1-245314-10
18. Joint Committee on Powder Diffraction Standards, File No. 06-0318.
19. Joint Committee on Powder Diffraction Standards, File No. 08-0342.
20. Zhao X., and Vanderbilt D. First-principle study of structural, vibrational and lattice dielectric properties of hafnium oxide. Phys. Rev. B. 65 (2002) 233106-1-233106-4
21. Fujimori H., Yashima M., Kakihana M., and Yoshimura M. In situ ultraviolet Raman study on the phase transition of Hafnia up to 2085 K. J. Am. Ceram. Soc. 84 (2001) 663-665
22. Anastassakis E., Papanicolaou B., and Asher I.M. Lattice dynamics and light scattering in hafnia and zirconia. J. Phys. Chem. Solids 36 (1975) 667-676
23. 2 films on Si (1 0 0). Surf. Sci. 576 (2005) 67-75
24. 2 substrates. J. Appl. Phys. 64 (1988) 4711-1-4711-6
25. Ninomiya S., and Adachi S. Optical properties of wurtzite CdS. J. Appl. Phys. 78 (1995) 1183-1-1183-8
26. Adachi S., Mori H., and Ozaki S. Model dielectric function for amorphous semiconductors. Phys. Rev. B 66 (2002) 153201-1-153201-4
27. 3 films. J. Appl. Phys. 97 (2005) 053501-1-053501-7
28. Sahoo N.K., Thakur S., Senthilkumar M., Bhattacharyya D., and Das N.C. Reactive electron beam evaporation of gadolinium oxide optical thin films for ultraviolet and deep ultraviolet laser wavelengths. Thin Solid Films 440 (2003) 155-168
29. 4 tandem absorber for solar selective applications. Appl. Surf. Sci. 254 (2008) 1694-1699
30. 3 for solar selective applications. J. Appl. Phys. 103 (2008) 023507-1-023507-11
31. xN films between Cu and Si. J. Cryst. Growth 263 (2004) 203-207
32. 8. Phys. Rev. B 75 (2007) 224302-1-224302-9
33. 2 (x=0-0.05) thin films grown by pulsed laser ablation. J. Appl. Phys. 103 (2008) 043712-1-043712-6
34. 8. J. Alloys Compd. 244 (1996) 85-89
35. 8. J. Nucl. Mater. 207 (1993) 98-102
36. 3 films using Raman microscopy. J. Phys. Chem. 99 (1995) 16383-16388