Reactive electron beam evaporation of gadolinium oxide optical thin films for ultraviolet and deep ultraviolet laser wavelengths

Thin Solid Films

Volumn 440, Issue 1-2, 2003, Pages 155-168

  Sahoo, N K ^a   Thakur, S ^a   Senthilkumar, M ^a   Bhattacharyya, D ^a   Das, N C ^a  

^a BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

Atomic force microscopy; E beam evaporation; Ellipsometry; Force modulation; Gadolinium oxide; Microstructural properties; Multilayers; Optical coating; Optical properties; Surface morphology; Viscoelastic property

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON BEAMS; ELLIPSOMETRY; ENERGY GAP; EVAPORATION; GADOLINIUM COMPOUNDS; LASER APPLICATIONS; MICROSTRUCTURE; MULTILAYERS; OPTICAL COATINGS; OPTICAL FILMS; PHASE MODULATION; REFRACTIVE INDEX; SPECTROPHOTOMETRY; SUBSTRATES; VISCOELASTICITY;

FORCE MODULATION;

THIN FILMS;

EID: 0042622635     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00678-3     Document Type: Article

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