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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 28, Issue 3, 2010, Pages 549-553

Fabrication of complex three-dimensional nanostructures using focused ion beam and nanomanipulation

(3) Jeon, Jangbae a Floresca, Herman Carlo a Kim, M J a

a The University of Texas at Dallas (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; CARBON NANOTUBES; FOCUSED ION BEAMS; ION BOMBARDMENT; IONS; MICROMANIPULATORS; MICROSCOPES; MILLING (MACHINING); MULTIWALLED CARBON NANOTUBES (MWCN); NANOSTRUCTURES; PLATINUM; POLYSTYRENES; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS;

3D STRUCTURE; ASSEMBLY TECHNIQUES; ASSISTED DEPOSITION; CONVEX SHAPES; DUAL BEAM; GRAY-SCALE IMAGES; ION BEAM MILLING; NANO MANIPULATOR; NANOMACHINING; NANOMANIPULATIONS; POLYSTYRENE MICRO-SPHERE; SCANNING ELECTRON MICROSCOPE; SCANNING PROBE MICROSCOPE TIP; SIX DEGREES OF FREEDOM; TAPPING MODES; THREE-DIMENSIONAL (3D) NANOSTRUCTURES; THREE-DIMENSIONAL NANOSTRUCTURES;

THREE DIMENSIONAL;

EID: 77953010700 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3406134 Document Type: Conference Paper

Times cited : (25)

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