Micrometer-scale fabrication and assembly using focused ion beam

Thin Solid Films

Volumn 509, Issue 1-2, 2006, Pages 113-117

  Tanaka, Takeo ^a   Irisawa, Tsuyoshi ^a   Fujiwara, Makoto ^a   Gennai, Norio ^a  

^a OSAKA SANGYO UNIVERSITY   (Japan)

Author keywords

Assembly of micro components; Focused ion beam; Manipulation; Micro universal joint

Indexed keywords

ION BEAM ASSISTED DEPOSITION; MACHINE DESIGN; MICROSTRUCTURE; MILLING (MACHINING); SELF ASSEMBLY; TRANSMISSION ELECTRON MICROSCOPY; UNIVERSAL JOINTS;

ASSEMBLY OF MICRO-COMPONENTS; FOCUSED ION BEAM; MANIPULATION; MICRO-UNIVERSAL JOINT;

NANOTECHNOLOGY;

EID: 33748142504     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.09.030     Document Type: Article

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