Review of vacuum packaging and maintenance of MEMS and the use of getters therein

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 8, Issue 3, 2009, Pages

  Ramesham, Rajeshuni ^a   Kullberg, Richard C ^b  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b NONE   (United States)

Author keywords

Adsorption; Desorption; Evaporable; Getters; Hermetic sealing; MEMS packaging; Nonevaporable; Outgassing; Vacuum packaging

Indexed keywords

ADSORPTION; COMPOSITE MICROMECHANICS; DEGASSING; DESORPTION; GETTERS; MEMS; METALS; MICROELECTROMECHANICAL DEVICES; PACKAGING MATERIALS; PUMPS; SENSORS; VACUUM; VACUUM APPLICATIONS; VACUUM TECHNOLOGY;

EVAPORABLE; HERMETIC SEALING; MEMS PACKAGING; NONEVAPORABLE; VACUUM PACKAGING;

PACKAGING;

EID: 77952762673     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3158064     Document Type: Review

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