Measuring mass flows in hermetically sealed MEMs & MOEMs to ensure device reliability

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6884, Issue , 2008, Pages

  Kullberg, R C ^a,b   Rossiter, D J ^a,b  

^a Oneida Research Services Inc   (United States)

^b OFS   (United States)

Author keywords

Analytical; Leak; MEMs; MoEMs; Outgassing; Reliability; RGA; Time of flight; TOF

Indexed keywords

HERMETIC PACKAGING; TIME OF FLIGHT;

DEGASSING; DEGRADATION; MAINTAINABILITY; MASS TRANSFER; RELIABILITY THEORY; SENSITIVITY ANALYSIS; SPECTROMETERS;

MEMS;

EID: 41149116566     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.760823     Document Type: Conference Paper

References (0)