New getter configuration at wafer level for assuring long term stability of MEMs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 260-267

  Moraja, Marco ^a   Amiotti, Marco ^a   Kullberg, Richard ^b  

^a SAES GETTERS S P A   (Italy)

^b SAES Getters USA Inc   (United States)

Author keywords

Getter; MEMs; Vacuum

Indexed keywords

HERMETIC SEALS; RELIABILITY; SILICON WAFERS; SORPTION; VACUUM;

LONG TERM STABILITY;

MICROELECTROMECHANICAL DEVICES;

EID: 0038735308     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472718     Document Type: Conference Paper

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